Formation of Fe-Pt intermetallic phase in nanostructures by electron-beam-induced deposition and postdeposition alloying processes

It was found that Fe and Pt can be successfully alloyed in rod-like nanostructures by electron-beam-induced deposition (EBID) using a Fe(CO) ₅ precursor in an ultrahigh vacuum scanning electron microscope (SEM), followed by a 600°C vacuum heating of the deposit and a subsequent surface platinum coating and a further 600-700°C annealing treatment. By using high-resolution transmission electron microscopy (HRTEM), image simulation and energy dispersion X-ray spectra analysis, L1₂-type intermetallic FePt₃ phase occurred in the nanostructure formed by the aforementioned EBID and postdeposition alloying processes.