Formation of iron nano-dot arrays by electron beam-induced deposition using an ultrahigh vacuum transmission electron microscope

M. Tanaka, M. Shimojo, M. Takeguchi, K. Mitsuishi, K. Furuya

研究成果: Conference article査読

11 被引用数 (Scopus)

抄録

We have successfully fabricated arrays of nano-dots containing iron (Fe) from iron pentacarbonyl gas sources on Si (1 1 1) substrates by electron beam-induced deposition in an ultrahigh vacuum transmission electron microscope. The nano-dots formed on Si (1 1 1)-7×7 surfaces showed amorphous structure of Fe and small amount of carbon mixture as deposited at room temperature, but changed their structure into crystal after annealing at 700 K. From structural analysis the dots are suggested to be α-Fe.

本文言語English
ページ(範囲)e2361-e2366
ジャーナルJournal of Crystal Growth
275
1-2
DOI
出版ステータスPublished - 2005 2 15
外部発表はい

ASJC Scopus subject areas

  • 凝縮系物理学
  • 無機化学
  • 材料化学

フィンガープリント

「Formation of iron nano-dot arrays by electron beam-induced deposition using an ultrahigh vacuum transmission electron microscope」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル