TY - JOUR
T1 - Formation of iron nano-dot arrays by electron beam-induced deposition using an ultrahigh vacuum transmission electron microscope
AU - Tanaka, M.
AU - Shimojo, M.
AU - Takeguchi, M.
AU - Mitsuishi, K.
AU - Furuya, K.
PY - 2005/2/15
Y1 - 2005/2/15
N2 - We have successfully fabricated arrays of nano-dots containing iron (Fe) from iron pentacarbonyl gas sources on Si (1 1 1) substrates by electron beam-induced deposition in an ultrahigh vacuum transmission electron microscope. The nano-dots formed on Si (1 1 1)-7×7 surfaces showed amorphous structure of Fe and small amount of carbon mixture as deposited at room temperature, but changed their structure into crystal after annealing at 700 K. From structural analysis the dots are suggested to be α-Fe.
AB - We have successfully fabricated arrays of nano-dots containing iron (Fe) from iron pentacarbonyl gas sources on Si (1 1 1) substrates by electron beam-induced deposition in an ultrahigh vacuum transmission electron microscope. The nano-dots formed on Si (1 1 1)-7×7 surfaces showed amorphous structure of Fe and small amount of carbon mixture as deposited at room temperature, but changed their structure into crystal after annealing at 700 K. From structural analysis the dots are suggested to be α-Fe.
KW - A1. Characterization
KW - A3. Metalorganic chemical vapor deposition
KW - B1. Nanomaterials
UR - http://www.scopus.com/inward/record.url?scp=15844393473&partnerID=8YFLogxK
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U2 - 10.1016/j.jcrysgro.2004.11.337
DO - 10.1016/j.jcrysgro.2004.11.337
M3 - Conference article
AN - SCOPUS:15844393473
VL - 275
SP - e2361-e2366
JO - Journal of Crystal Growth
JF - Journal of Crystal Growth
SN - 0022-0248
IS - 1-2
ER -