Formation of iron nano-dots by electron beam induced deposition using an ultrahigh vacuum transmission electron microscope

M. Tanaka, F. Chu, Masayuki Shimojo, M. Takeguchi, K. Furuya

研究成果: Conference contribution

抄録

The fabrication of arrays of iron nano-dots on cleaned Si substrates by electron beam induced deposition (EBID) using ultrahigh vacuum (UHV) transmission electron microscope (TEM) was investigated. The samples were Si(111) slices prepared as TEM specimens by mechanical dimpling followed by chemical etching, with an etchant HNO3. After fabrication and observation of dots, the room temperature (RT)-deposited substrates were annealed at 700K for 1 hour and were observed again. Results show that the spots from the dots form hexagonal with lattice spacing of 0.203±nm and they are rotated about 17.5 degrees from <200> Si.

元の言語English
ホスト出版物のタイトルDigest of Papers - Microprocesses and Nanotechnology 2004
ページ60-61
ページ数2
出版物ステータスPublished - 2004
外部発表Yes
イベント2004 International Microprocesses and Nanotechnology Conference - Osaka
継続期間: 2004 10 262004 10 29

Other

Other2004 International Microprocesses and Nanotechnology Conference
Osaka
期間04/10/2604/10/29

Fingerprint

Ultrahigh vacuum
Electron beams
Electron microscopes
Iron
Fabrication
Substrates
Etching
Temperature

ASJC Scopus subject areas

  • Engineering(all)

これを引用

Tanaka, M., Chu, F., Shimojo, M., Takeguchi, M., & Furuya, K. (2004). Formation of iron nano-dots by electron beam induced deposition using an ultrahigh vacuum transmission electron microscope. : Digest of Papers - Microprocesses and Nanotechnology 2004 (pp. 60-61)

Formation of iron nano-dots by electron beam induced deposition using an ultrahigh vacuum transmission electron microscope. / Tanaka, M.; Chu, F.; Shimojo, Masayuki; Takeguchi, M.; Furuya, K.

Digest of Papers - Microprocesses and Nanotechnology 2004. 2004. p. 60-61.

研究成果: Conference contribution

Tanaka, M, Chu, F, Shimojo, M, Takeguchi, M & Furuya, K 2004, Formation of iron nano-dots by electron beam induced deposition using an ultrahigh vacuum transmission electron microscope. : Digest of Papers - Microprocesses and Nanotechnology 2004. pp. 60-61, 2004 International Microprocesses and Nanotechnology Conference, Osaka, 04/10/26.
Tanaka M, Chu F, Shimojo M, Takeguchi M, Furuya K. Formation of iron nano-dots by electron beam induced deposition using an ultrahigh vacuum transmission electron microscope. : Digest of Papers - Microprocesses and Nanotechnology 2004. 2004. p. 60-61
Tanaka, M. ; Chu, F. ; Shimojo, Masayuki ; Takeguchi, M. ; Furuya, K. / Formation of iron nano-dots by electron beam induced deposition using an ultrahigh vacuum transmission electron microscope. Digest of Papers - Microprocesses and Nanotechnology 2004. 2004. pp. 60-61
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