Formation of metal nano-wires on heat-treated substrates using an ultrahigh vacuum transmission electron microscope

M. Tanaka; T. Wagner; M. Takeguchi; M. Han; M. Shimojo; K. Mitsuishi; K. Furuya

doi:10.1002/sia.2402

Formation of metal nano-wires on heat-treated substrates using an ultrahigh vacuum transmission electron microscope

M. Tanaka, T. Wagner, M. Takeguchi, M. Han, M. Shimojo, K. Mitsuishi, K. Furuya

研究成果: Article › 査読

1 被引用数 (Scopus)

抄録

Formation of metal nano-islands on heat-treated substrates by either conventional deposition or by electron beam-induced chemical vapour deposition (EBI-CVD) was performed at elevated temperatures in an ultrahigh vacuum transmission electron microscope (UHV-TEM). Pd islands on SrTiO₃ (001) substrates, Pd silicide islands on Si (111) substrates, and Fe silicide islands on Si (111) substrates showed bimodal island growth; both substrates blocked islands and nano-wires. The morphologies of these islands are suggested to be sensitive to the substrate conditions because of heat treatment before deposition. Selective growth of the nano-wires was successful in the case of EBI-CVD.

本文言語	English
ページ（範囲）	1568-1572
ページ数	5
ジャーナル	Surface and Interface Analysis
巻	38
号	12-13
DOI	https://doi.org/10.1002/sia.2402
出版ステータス	Published - 2006 12
外部発表	はい

ASJC Scopus subject areas

Chemistry(all)
Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films
Materials Chemistry

文献へのアクセス

10.1002/sia.2402

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引用スタイル

@article{a2d7ee442b764d478172260b72d19989,

title = "Formation of metal nano-wires on heat-treated substrates using an ultrahigh vacuum transmission electron microscope",

abstract = "Formation of metal nano-islands on heat-treated substrates by either conventional deposition or by electron beam-induced chemical vapour deposition (EBI-CVD) was performed at elevated temperatures in an ultrahigh vacuum transmission electron microscope (UHV-TEM). Pd islands on SrTiO3 (001) substrates, Pd silicide islands on Si (111) substrates, and Fe silicide islands on Si (111) substrates showed bimodal island growth; both substrates blocked islands and nano-wires. The morphologies of these islands are suggested to be sensitive to the substrate conditions because of heat treatment before deposition. Selective growth of the nano-wires was successful in the case of EBI-CVD.",

keywords = "Electron beam induced deposition, Nanowires, UHV-TEM",

author = "M. Tanaka and T. Wagner and M. Takeguchi and M. Han and M. Shimojo and K. Mitsuishi and K. Furuya",

year = "2006",

month = dec,

doi = "10.1002/sia.2402",

language = "English",

volume = "38",

pages = "1568--1572",

journal = "Surface and Interface Analysis",

issn = "0142-2421",

publisher = "John Wiley and Sons Ltd",

number = "12-13",

}

TY - JOUR

T1 - Formation of metal nano-wires on heat-treated substrates using an ultrahigh vacuum transmission electron microscope

AU - Tanaka, M.

AU - Wagner, T.

AU - Takeguchi, M.

AU - Han, M.

AU - Shimojo, M.

AU - Mitsuishi, K.

AU - Furuya, K.

PY - 2006/12

Y1 - 2006/12

N2 - Formation of metal nano-islands on heat-treated substrates by either conventional deposition or by electron beam-induced chemical vapour deposition (EBI-CVD) was performed at elevated temperatures in an ultrahigh vacuum transmission electron microscope (UHV-TEM). Pd islands on SrTiO3 (001) substrates, Pd silicide islands on Si (111) substrates, and Fe silicide islands on Si (111) substrates showed bimodal island growth; both substrates blocked islands and nano-wires. The morphologies of these islands are suggested to be sensitive to the substrate conditions because of heat treatment before deposition. Selective growth of the nano-wires was successful in the case of EBI-CVD.

AB - Formation of metal nano-islands on heat-treated substrates by either conventional deposition or by electron beam-induced chemical vapour deposition (EBI-CVD) was performed at elevated temperatures in an ultrahigh vacuum transmission electron microscope (UHV-TEM). Pd islands on SrTiO3 (001) substrates, Pd silicide islands on Si (111) substrates, and Fe silicide islands on Si (111) substrates showed bimodal island growth; both substrates blocked islands and nano-wires. The morphologies of these islands are suggested to be sensitive to the substrate conditions because of heat treatment before deposition. Selective growth of the nano-wires was successful in the case of EBI-CVD.

KW - Electron beam induced deposition

KW - Nanowires

KW - UHV-TEM

UR - http://www.scopus.com/inward/record.url?scp=33845946028&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=33845946028&partnerID=8YFLogxK

U2 - 10.1002/sia.2402

DO - 10.1002/sia.2402

M3 - Article

AN - SCOPUS:33845946028

VL - 38

SP - 1568

EP - 1572

JO - Surface and Interface Analysis

JF - Surface and Interface Analysis

SN - 0142-2421

IS - 12-13

ER -