Formation of metal nano-wires on heat-treated substrates using an ultrahigh vacuum transmission electron microscope

M. Tanaka, T. Wagner, M. Takeguchi, M. Han, M. Shimojo, K. Mitsuishi, K. Furuya

研究成果: Article査読

1 被引用数 (Scopus)

抄録

Formation of metal nano-islands on heat-treated substrates by either conventional deposition or by electron beam-induced chemical vapour deposition (EBI-CVD) was performed at elevated temperatures in an ultrahigh vacuum transmission electron microscope (UHV-TEM). Pd islands on SrTiO3 (001) substrates, Pd silicide islands on Si (111) substrates, and Fe silicide islands on Si (111) substrates showed bimodal island growth; both substrates blocked islands and nano-wires. The morphologies of these islands are suggested to be sensitive to the substrate conditions because of heat treatment before deposition. Selective growth of the nano-wires was successful in the case of EBI-CVD.

本文言語English
ページ(範囲)1568-1572
ページ数5
ジャーナルSurface and Interface Analysis
38
12-13
DOI
出版ステータスPublished - 2006 12
外部発表はい

ASJC Scopus subject areas

  • 化学 (全般)
  • 凝縮系物理学
  • 表面および界面
  • 表面、皮膜および薄膜
  • 材料化学

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