抄録
We observed the formation of subwavelength periodic strained layers associated with nanovoids in the cross section of femtosecond laser-irradiated lines written inside 4H -SiC single crystals. Both conventional and high-voltage transmission electron microscopies were carried out for microstructural analyses. The cross section of the irradiated lines consists of four to six groups of fine periodic structures. Each group is composed of strained layers with a typical spacing of 150 or 300 nm. The layers extend along the irradiated lines, aligned parallel to the electric field of the laser light. Tiny voids approximately 20 nm in diameter are found in the layers.
元の言語 | English |
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記事番号 | 054307 |
ジャーナル | Journal of Applied Physics |
巻 | 106 |
発行部数 | 5 |
DOI | |
出版物ステータス | Published - 2009 |
外部発表 | Yes |
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ASJC Scopus subject areas
- Physics and Astronomy(all)
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Formation of periodic strained layers associated with nanovoids inside a silicon carbide single crystal induced by femtosecond laser irradiation. / Okada, Tatsuya; Tomita, Takuro; Matsuo, Shigeki; Hashimoto, Shuichi; Ishida, Yoichiro; Kiyama, Satoshi; Takahashi, Tomonori.
:: Journal of Applied Physics, 巻 106, 番号 5, 054307, 2009.研究成果: Article
}
TY - JOUR
T1 - Formation of periodic strained layers associated with nanovoids inside a silicon carbide single crystal induced by femtosecond laser irradiation
AU - Okada, Tatsuya
AU - Tomita, Takuro
AU - Matsuo, Shigeki
AU - Hashimoto, Shuichi
AU - Ishida, Yoichiro
AU - Kiyama, Satoshi
AU - Takahashi, Tomonori
PY - 2009
Y1 - 2009
N2 - We observed the formation of subwavelength periodic strained layers associated with nanovoids in the cross section of femtosecond laser-irradiated lines written inside 4H -SiC single crystals. Both conventional and high-voltage transmission electron microscopies were carried out for microstructural analyses. The cross section of the irradiated lines consists of four to six groups of fine periodic structures. Each group is composed of strained layers with a typical spacing of 150 or 300 nm. The layers extend along the irradiated lines, aligned parallel to the electric field of the laser light. Tiny voids approximately 20 nm in diameter are found in the layers.
AB - We observed the formation of subwavelength periodic strained layers associated with nanovoids in the cross section of femtosecond laser-irradiated lines written inside 4H -SiC single crystals. Both conventional and high-voltage transmission electron microscopies were carried out for microstructural analyses. The cross section of the irradiated lines consists of four to six groups of fine periodic structures. Each group is composed of strained layers with a typical spacing of 150 or 300 nm. The layers extend along the irradiated lines, aligned parallel to the electric field of the laser light. Tiny voids approximately 20 nm in diameter are found in the layers.
UR - http://www.scopus.com/inward/record.url?scp=70349321620&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=70349321620&partnerID=8YFLogxK
U2 - 10.1063/1.3211311
DO - 10.1063/1.3211311
M3 - Article
AN - SCOPUS:70349321620
VL - 106
JO - Journal of Applied Physics
JF - Journal of Applied Physics
SN - 0021-8979
IS - 5
M1 - 054307
ER -