Formation of protection layer during oxidation of Al-implanted TiN coating

Engineering & Materials Science

• Oxidation 100%
• Coatings 84%
• Oxygen 52%
• Aluminum oxide 31%
• Ions 29%
• Ion implantation 21%
• Thermooxidation 21%
• Chemical stability 21%
• Oxidation resistance 20%
• Plating 18%
• Activation energy 16%
• Atoms 16%
• Cathodes 16%
• Thin films 15%
• Stainless steel 14%
• Oxides 13%
• Temperature 12%
• Aluminum 12%
• Substrates 11%
• Defects 11%
• Hot Temperature 7%

Physics & Astronomy

• oxidation 83%
• coatings 76%
• oxygen 34%
• atmospheres 29%
• implantation 25%
• aluminum oxides 23%
• ion plating 18%
• hollow cathodes 16%
• oxidation resistance 16%
• temperature 12%
• stainless steels 12%
• activation energy 10%
• aluminum 9%
• dosage 9%
• oxides 8%
• kinetics 8%
• defects 7%
• thin films 7%
• atoms 7%
• ions 6%

Chemical Compounds

• Coating Agent 67%
• Oxidation Reaction 51%
• Dioxygen 31%
• Hollow Cathode Discharge 27%
• Thermooxidation 19%
• Oxidation Kinetics 18%
• Liquid Film 15%
• Chemical Stability 15%
• Protective 13%
• Reaction Activation Energy 11%
• Resistance 10%
• Diffusion 9%
• Modification 9%
• Oxide 8%
• Purity 8%
• Ion 6%
• Surface 5%