Fracture toughness tests have been performed for an electroless deposited Ni-P amorphous alloy thin film with different crack growth directions, which are perpendicular and parallel to the deposition growth direction. Cantilever beam type specimens with dimensions of 10 by 10 by 50 μm3 were prepared from a Ni-P amorphous thin film, and notches with different direction were introduced by focused ion beam machining. Fatigue pre-cracks were introduced ahead of the notches. Both introduction of fatigue pre-cracks and fracture tests were performed using a newly developed mechanical testing machine for micro-sized specimens. Fracture behavior is different between the two types of specimens. KIC values were not obtained as the criteria of plane strain requirements were not satisfied for this size of the specimen, so that the provisional fracture toughness KQ values were obtained. The KQ value of the specimen with crack propagation direction being parallel to the deposition growth direction was 7.3 MPa m1/2, while that with crack propagation direction being perpendicular to the deposition growth direction was 4.2 MPa m1/2. These results suggest that the electroless deposited amorphous alloy thin film has anisotropic mechanical properties.
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