Fundamental Properties of 3D Microfabrication Using a Femto-second Laser

Mikio Yamanoi, Satoshi Wada, Masahiro Anzai, Ohmori Hitoshi Ohmori, Akitake Makinouchi

研究成果: Conference contribution

抄録

Micro scaled grooves and cavities are fabricated with the method of direct writing and superposing grooving in ambient air using femtosecond laser pulses and copper, aiming at establishing an industrially useful femtosecond laser processing machine to be able to fabricate three dimensional micro-scale structures, especially micro scaled molds, and processing techniques. The following items are demanded to make femtosecond laser processing machine an industrially useful tool. 1) There is no thermally influenced region around the area irradiated by the laser beam. 2) Surfaces irradiated laser beam are smooth. 3) Substances ablated to form are not attached on the surface of the work. In this study, fundamental properties of grooving and cavity processing are investigated experimentally, considering above items, especially eyeing on the items 1) and 2). As a result obtained in this research, the method of direct writing and superposing grooving havs a potential to fabricate micro scaled structure.

元の言語English
ホスト出版物のタイトルProceedings of SPIE - The International Society for Optical Engineering
編集者I. Miyamoto, A. Ostendorf, K. Sugioka, H. Helvajian
ページ378-380
ページ数3
5063
DOI
出版物ステータスPublished - 2003
外部発表Yes
イベントFourth International Symposium on Laser Precision Microfabrication - Munich, Germany
継続期間: 2003 6 212003 6 24

Other

OtherFourth International Symposium on Laser Precision Microfabrication
Germany
Munich
期間03/6/2103/6/24

Fingerprint

Microfabrication
grooving
Ultrashort pulses
Lasers
Processing
lasers
Laser beams
laser beams
cavities
Molds
grooves
Copper
copper
microstructure
Microstructure
air
Air
pulses

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

これを引用

Yamanoi, M., Wada, S., Anzai, M., Hitoshi Ohmori, O., & Makinouchi, A. (2003). Fundamental Properties of 3D Microfabrication Using a Femto-second Laser. : I. Miyamoto, A. Ostendorf, K. Sugioka, & H. Helvajian (版), Proceedings of SPIE - The International Society for Optical Engineering (巻 5063, pp. 378-380) https://doi.org/10.1117/12.540604

Fundamental Properties of 3D Microfabrication Using a Femto-second Laser. / Yamanoi, Mikio; Wada, Satoshi; Anzai, Masahiro; Hitoshi Ohmori, Ohmori; Makinouchi, Akitake.

Proceedings of SPIE - The International Society for Optical Engineering. 版 / I. Miyamoto; A. Ostendorf; K. Sugioka; H. Helvajian. 巻 5063 2003. p. 378-380.

研究成果: Conference contribution

Yamanoi, M, Wada, S, Anzai, M, Hitoshi Ohmori, O & Makinouchi, A 2003, Fundamental Properties of 3D Microfabrication Using a Femto-second Laser. : I Miyamoto, A Ostendorf, K Sugioka & H Helvajian (版), Proceedings of SPIE - The International Society for Optical Engineering. 巻. 5063, pp. 378-380, Fourth International Symposium on Laser Precision Microfabrication, Munich, Germany, 03/6/21. https://doi.org/10.1117/12.540604
Yamanoi M, Wada S, Anzai M, Hitoshi Ohmori O, Makinouchi A. Fundamental Properties of 3D Microfabrication Using a Femto-second Laser. : Miyamoto I, Ostendorf A, Sugioka K, Helvajian H, 編集者, Proceedings of SPIE - The International Society for Optical Engineering. 巻 5063. 2003. p. 378-380 https://doi.org/10.1117/12.540604
Yamanoi, Mikio ; Wada, Satoshi ; Anzai, Masahiro ; Hitoshi Ohmori, Ohmori ; Makinouchi, Akitake. / Fundamental Properties of 3D Microfabrication Using a Femto-second Laser. Proceedings of SPIE - The International Society for Optical Engineering. 編集者 / I. Miyamoto ; A. Ostendorf ; K. Sugioka ; H. Helvajian. 巻 5063 2003. pp. 378-380
@inproceedings{e81eb79e1d4f4837ae7e9235126dfa96,
title = "Fundamental Properties of 3D Microfabrication Using a Femto-second Laser",
abstract = "Micro scaled grooves and cavities are fabricated with the method of direct writing and superposing grooving in ambient air using femtosecond laser pulses and copper, aiming at establishing an industrially useful femtosecond laser processing machine to be able to fabricate three dimensional micro-scale structures, especially micro scaled molds, and processing techniques. The following items are demanded to make femtosecond laser processing machine an industrially useful tool. 1) There is no thermally influenced region around the area irradiated by the laser beam. 2) Surfaces irradiated laser beam are smooth. 3) Substances ablated to form are not attached on the surface of the work. In this study, fundamental properties of grooving and cavity processing are investigated experimentally, considering above items, especially eyeing on the items 1) and 2). As a result obtained in this research, the method of direct writing and superposing grooving havs a potential to fabricate micro scaled structure.",
keywords = "3D Microfabrication and Metal Processing, Athermal Processing, Femtosecond Laser, Laser Processing",
author = "Mikio Yamanoi and Satoshi Wada and Masahiro Anzai and {Hitoshi Ohmori}, Ohmori and Akitake Makinouchi",
year = "2003",
doi = "10.1117/12.540604",
language = "English",
volume = "5063",
pages = "378--380",
editor = "I. Miyamoto and A. Ostendorf and K. Sugioka and H. Helvajian",
booktitle = "Proceedings of SPIE - The International Society for Optical Engineering",

}

TY - GEN

T1 - Fundamental Properties of 3D Microfabrication Using a Femto-second Laser

AU - Yamanoi, Mikio

AU - Wada, Satoshi

AU - Anzai, Masahiro

AU - Hitoshi Ohmori, Ohmori

AU - Makinouchi, Akitake

PY - 2003

Y1 - 2003

N2 - Micro scaled grooves and cavities are fabricated with the method of direct writing and superposing grooving in ambient air using femtosecond laser pulses and copper, aiming at establishing an industrially useful femtosecond laser processing machine to be able to fabricate three dimensional micro-scale structures, especially micro scaled molds, and processing techniques. The following items are demanded to make femtosecond laser processing machine an industrially useful tool. 1) There is no thermally influenced region around the area irradiated by the laser beam. 2) Surfaces irradiated laser beam are smooth. 3) Substances ablated to form are not attached on the surface of the work. In this study, fundamental properties of grooving and cavity processing are investigated experimentally, considering above items, especially eyeing on the items 1) and 2). As a result obtained in this research, the method of direct writing and superposing grooving havs a potential to fabricate micro scaled structure.

AB - Micro scaled grooves and cavities are fabricated with the method of direct writing and superposing grooving in ambient air using femtosecond laser pulses and copper, aiming at establishing an industrially useful femtosecond laser processing machine to be able to fabricate three dimensional micro-scale structures, especially micro scaled molds, and processing techniques. The following items are demanded to make femtosecond laser processing machine an industrially useful tool. 1) There is no thermally influenced region around the area irradiated by the laser beam. 2) Surfaces irradiated laser beam are smooth. 3) Substances ablated to form are not attached on the surface of the work. In this study, fundamental properties of grooving and cavity processing are investigated experimentally, considering above items, especially eyeing on the items 1) and 2). As a result obtained in this research, the method of direct writing and superposing grooving havs a potential to fabricate micro scaled structure.

KW - 3D Microfabrication and Metal Processing

KW - Athermal Processing

KW - Femtosecond Laser

KW - Laser Processing

UR - http://www.scopus.com/inward/record.url?scp=2342534465&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=2342534465&partnerID=8YFLogxK

U2 - 10.1117/12.540604

DO - 10.1117/12.540604

M3 - Conference contribution

AN - SCOPUS:2342534465

VL - 5063

SP - 378

EP - 380

BT - Proceedings of SPIE - The International Society for Optical Engineering

A2 - Miyamoto, I.

A2 - Ostendorf, A.

A2 - Sugioka, K.

A2 - Helvajian, H.

ER -