Fundamental Properties of 3D Microfabrication Using a Femto-second Laser

Mikio Yamanoi, Satoshi Wada, Masahiro Anzai, Ohmori Hitoshi Ohmori, Akitake Makinouchi

研究成果: Conference article査読


Micro scaled grooves and cavities are fabricated with the method of direct writing and superposing grooving in ambient air using femtosecond laser pulses and copper, aiming at establishing an industrially useful femtosecond laser processing machine to be able to fabricate three dimensional micro-scale structures, especially micro scaled molds, and processing techniques. The following items are demanded to make femtosecond laser processing machine an industrially useful tool. 1) There is no thermally influenced region around the area irradiated by the laser beam. 2) Surfaces irradiated laser beam are smooth. 3) Substances ablated to form are not attached on the surface of the work. In this study, fundamental properties of grooving and cavity processing are investigated experimentally, considering above items, especially eyeing on the items 1) and 2). As a result obtained in this research, the method of direct writing and superposing grooving havs a potential to fabricate micro scaled structure.

ジャーナルProceedings of SPIE - The International Society for Optical Engineering
出版ステータスPublished - 2003 12 1
イベントFourth International Symposium on Laser Precision Microfabrication - Munich, Germany
継続期間: 2003 6 212003 6 24

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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