We demonstrate improved characteristics of GaInN light-emitting diodes (LEDs) grown on Si by a horizontal metalorganic chemical vapor deposition method. A high-temperature-grown thin AlGaN/AlN intermediate layer and AlN/GaN multilayers have been used for the growth of a high-quality LED structure on Si substrate. The green LED on Si exhibited a forward voltage of 4.1 V at 20 mA and a series resistance of 30 Ω. The output power of 18-20 μW was obtained at 20 mA, which was approximately half that of LED grown on sapphire. The AlGaN/GaN high electron mobility transistors (HEMTs) were also realized on Si substrates. The 2-um-gate length AlGaN/GaN HEMT showed a good maximum extrinsic transconductance of 142 mS/mm.
|出版ステータス||Published - 2004 10 28|
|イベント||State-of-the-Art Program on Compound Semiconductors XL (SOTAPOCS XL) and Narrow Bandgap Optoelectronic Materials and Devices II - Proceedings of the International Symposium - San Antonio, TX, United States|
継続期間: 2004 5 9 → 2004 5 14
|Conference||State-of-the-Art Program on Compound Semiconductors XL (SOTAPOCS XL) and Narrow Bandgap Optoelectronic Materials and Devices II - Proceedings of the International Symposium|
|City||San Antonio, TX|
|Period||04/5/9 → 04/5/14|
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