Gas sensor using complete reflection at free edge of SH-SAW

Tooru Nomura, Atsushi Saitoh, Tooru Miyazaki

研究成果: Article査読

3 被引用数 (Scopus)

抄録

A new gas sensor has been designed by using SH-SAW device. Shear horizontal mode surface acoustic wave (SH-SAW) has a unique characteristic of complete reflection at the free edges of the substrate. The SH-SAW are excited on a 36 YX LiTaO 3 and the right angle edge of the substrate has been used to reflect these waves. Both the phase and amplitude of the SH-SAW reflected from the edge were measured as a sensor response. Several experiments were performed to verify the edge reflection type SAW sensor in gas phase.

本文言語English
ページ(範囲)113-118
ページ数6
ジャーナルFerroelectrics
273
DOI
出版ステータスPublished - 2002 1 1

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 凝縮系物理学

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