TY - JOUR
T1 - Generation mechanism and in situ growth behavior of α-iron nanocrystals by electron beam induced deposition
AU - Zhang, Wei
AU - Shimojo, Masayuki
AU - Takeguchi, Masaki
AU - Che, Ren Chao
AU - Furuya, Kazuo
PY - 2006/8/1
Y1 - 2006/8/1
N2 - The nanofabrication of iron-containing deposits with a precursor of Fe(CO)5 and the growth of Α-Fe nanocrystals by Electron Beam Induced Deposition was investigated. The nanocryatals were formed by irradiation of a position-fixed focused electron beam for 1200s. The results show that Fe(CO)5 molecules decomposed and debonded under electron beam formed target deposits contains amorphous Fe, C, and O. The Fe(CO)5 bond dissociation energy is 6eV and the threshold energy to dissociate C-O bond is 12 eV. The secondary electrons (SE) with 50 eV energy are generated by inelastic scattering of incident primary electrons (PE). The SE can dissociate the gas molecules to deposit the Fe, C, and O molecules in the target, which develops the target deposits into a tip structure. The growth rate of Fe nanocrystals shows that its size is linearly dependent on the irradiation time and their growth speed is 0.08 nm/s.
AB - The nanofabrication of iron-containing deposits with a precursor of Fe(CO)5 and the growth of Α-Fe nanocrystals by Electron Beam Induced Deposition was investigated. The nanocryatals were formed by irradiation of a position-fixed focused electron beam for 1200s. The results show that Fe(CO)5 molecules decomposed and debonded under electron beam formed target deposits contains amorphous Fe, C, and O. The Fe(CO)5 bond dissociation energy is 6eV and the threshold energy to dissociate C-O bond is 12 eV. The secondary electrons (SE) with 50 eV energy are generated by inelastic scattering of incident primary electrons (PE). The SE can dissociate the gas molecules to deposit the Fe, C, and O molecules in the target, which develops the target deposits into a tip structure. The growth rate of Fe nanocrystals shows that its size is linearly dependent on the irradiation time and their growth speed is 0.08 nm/s.
UR - http://www.scopus.com/inward/record.url?scp=33748519865&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=33748519865&partnerID=8YFLogxK
U2 - 10.1002/adem.200600026
DO - 10.1002/adem.200600026
M3 - Article
AN - SCOPUS:33748519865
VL - 8
SP - 711
EP - 714
JO - Advanced Engineering Materials
JF - Advanced Engineering Materials
SN - 1438-1656
IS - 8
ER -