Generation of strong magnetic field using 60 mmφ superconducting bulk magnet and its application to magnetron sputtering device

Y. Yanagi, T. Matsuda, H. Hazama, K. Yokouchi, M. Yoshikawa, Y. Itoh, T. Oka, H. Ikuta, U. Mizutani

研究成果: Conference article査読

33 被引用数 (Scopus)

抄録

To make a practical application of a superconducting bulk magnet (SBM), it is necessary that the SBM generates a strong and stable magnetic field in a working space and the magnet can be handled without any special care that would be needed because of the use of a superconductor. To satisfy these requirements, we have designed a portable and user-friendly magnet system consisting of a small air-cooled type refrigerator and a bulk superconductor. By using the stress-controlling magnetization technique, we could achieve a magnetic flux density of 8.0 T on the bulk surface and 6.5 T over the vacuum chamber surface of the refrigerator, when a 60 mmφ Gd-Ba-Cu-O bulk superconductor reinforced with a 5 mm thick stainless steel ring was magnetized by field cooling in 8.5 T to 27 K. We have confirmed that the bulk magnet system coupled with a battery is quite portable and can be delivered to any location by using a car with an electric power outlet in the cabin. We have constructed a magnetron sputtering device that employs a bulk magnet system delivered from the place of magnetization by this method. This sputtering device exhibits several unique features such as deposition at a very low Ar gas pressure because the magnetic field is 20 times stronger than that obtained by a conventional device in the working space.

本文言語English
ページ(範囲)764-769
ページ数6
ジャーナルPhysica C: Superconductivity and its applications
426-431
I
DOI
出版ステータスPublished - 2005 10 1
外部発表はい
イベントProceedings of the 17th International Symposium on Superconductivity (ISS 2004) Advances in Supeconductivity -
継続期間: 2004 11 232004 11 25

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 凝縮系物理学
  • エネルギー工学および電力技術
  • 電子工学および電気工学

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