TY - JOUR
T1 - Generation of strong magnetic field using 60 mmφ superconducting bulk magnet and its application to magnetron sputtering device
AU - Yanagi, Y.
AU - Matsuda, T.
AU - Hazama, H.
AU - Yokouchi, K.
AU - Yoshikawa, M.
AU - Itoh, Y.
AU - Oka, T.
AU - Ikuta, H.
AU - Mizutani, U.
N1 - Funding Information:
This work was partly supported by a Grant-in-Aid for the Development of Innovative Technology from the Ministry of Education, Sports, Culture, Science and Technology, Japan.
Copyright:
Copyright 2008 Elsevier B.V., All rights reserved.
PY - 2005/10/1
Y1 - 2005/10/1
N2 - To make a practical application of a superconducting bulk magnet (SBM), it is necessary that the SBM generates a strong and stable magnetic field in a working space and the magnet can be handled without any special care that would be needed because of the use of a superconductor. To satisfy these requirements, we have designed a portable and user-friendly magnet system consisting of a small air-cooled type refrigerator and a bulk superconductor. By using the stress-controlling magnetization technique, we could achieve a magnetic flux density of 8.0 T on the bulk surface and 6.5 T over the vacuum chamber surface of the refrigerator, when a 60 mmφ Gd-Ba-Cu-O bulk superconductor reinforced with a 5 mm thick stainless steel ring was magnetized by field cooling in 8.5 T to 27 K. We have confirmed that the bulk magnet system coupled with a battery is quite portable and can be delivered to any location by using a car with an electric power outlet in the cabin. We have constructed a magnetron sputtering device that employs a bulk magnet system delivered from the place of magnetization by this method. This sputtering device exhibits several unique features such as deposition at a very low Ar gas pressure because the magnetic field is 20 times stronger than that obtained by a conventional device in the working space.
AB - To make a practical application of a superconducting bulk magnet (SBM), it is necessary that the SBM generates a strong and stable magnetic field in a working space and the magnet can be handled without any special care that would be needed because of the use of a superconductor. To satisfy these requirements, we have designed a portable and user-friendly magnet system consisting of a small air-cooled type refrigerator and a bulk superconductor. By using the stress-controlling magnetization technique, we could achieve a magnetic flux density of 8.0 T on the bulk surface and 6.5 T over the vacuum chamber surface of the refrigerator, when a 60 mmφ Gd-Ba-Cu-O bulk superconductor reinforced with a 5 mm thick stainless steel ring was magnetized by field cooling in 8.5 T to 27 K. We have confirmed that the bulk magnet system coupled with a battery is quite portable and can be delivered to any location by using a car with an electric power outlet in the cabin. We have constructed a magnetron sputtering device that employs a bulk magnet system delivered from the place of magnetization by this method. This sputtering device exhibits several unique features such as deposition at a very low Ar gas pressure because the magnetic field is 20 times stronger than that obtained by a conventional device in the working space.
KW - Bulk superconductor
KW - Delivery of a bulk magnet
KW - Magnetron sputtering device
KW - Metal-ring reinforcement
KW - Stress-controlling magnetization
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U2 - 10.1016/j.physc.2005.01.048
DO - 10.1016/j.physc.2005.01.048
M3 - Conference article
AN - SCOPUS:25644450296
VL - 426-431
SP - 764
EP - 769
JO - Physica C: Superconductivity and its Applications
JF - Physica C: Superconductivity and its Applications
SN - 0921-4534
IS - I
T2 - Proceedings of the 17th International Symposium on Superconductivity (ISS 2004) Advances in Supeconductivity
Y2 - 23 November 2004 through 25 November 2004
ER -