Global Planarization (Flow vs. CMP)

研究成果: Article

元の言語English
ページ(範囲)118
ジャーナル1993 Symposium on VLSI Technology, Technical Digest (Rump Session R-2)
出版物ステータスPublished - 1993 5 17

これを引用

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title = "Global Planarization (Flow vs. CMP)",
author = "T. Homma",
year = "1993",
month = "5",
day = "17",
language = "English",
pages = "118",
journal = "1993 Symposium on VLSI Technology, Technical Digest (Rump Session R-2)",

}

TY - JOUR

T1 - Global Planarization (Flow vs. CMP)

AU - Homma, T.

PY - 1993/5/17

Y1 - 1993/5/17

M3 - Article

SP - 118

JO - 1993 Symposium on VLSI Technology, Technical Digest (Rump Session R-2)

JF - 1993 Symposium on VLSI Technology, Technical Digest (Rump Session R-2)

ER -