Hands-on-access fabrication facility for MEMS Development and production

Kentaro Totsu, Masaaki Moriyama, Yukio Suzuki, Takahito Ono, Shinya Yoshida, Masayoshi Esashi

研究成果: Conference contribution

抄録

We offer a hands-on-access fabrication facility for MEMS and semiconductor research and development. The facility is located at Jun-ichi Nishizawa Memorial Research Center, Tohoku University, and started in 2010. The principle is an open access that users can utilize the fab and operate the equipment by themselves. Users also can access a great deal of know-how accumulated at Tohoku University. Over 120 companies have utilized the fab for developing various devices, such as an accelerometer, a pressure sensor, a photo diode, a radiation sensor, a solar cell and a microphone. To accelerate University's R&D and education, product fabrication by a company user is started in July 2013.

本文言語English
ホスト出版物のタイトル20th International Display Workshops 2013, IDW 2013
出版社International Display Workshops
ページ1405-1408
ページ数4
ISBN(電子版)9781510827783
出版ステータスPublished - 2013
外部発表はい
イベント20th International Display Workshops 2013, IDW 2013 - Sapporo, Japan
継続期間: 2013 12月 32013 12月 6

出版物シリーズ

名前Proceedings of the International Display Workshops
2
ISSN(印刷版)1883-2490

Conference

Conference20th International Display Workshops 2013, IDW 2013
国/地域Japan
CitySapporo
Period13/12/313/12/6

ASJC Scopus subject areas

  • コンピュータ ビジョンおよびパターン認識
  • 人間とコンピュータの相互作用
  • 電子工学および電気工学
  • 電子材料、光学材料、および磁性材料
  • 放射線学、核医学およびイメージング

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