High precision adaptive control for piezo-actuated stage

Xinkai Chen, Toshikuni Ozaki

研究成果: Conference contribution

抄録

The piezo-actuated stage is composed of a piezo electric actuator (PEA) and a positioning mechanism (PM). Due to the existence of hysteretic nonlinearity in the PEA and the friction in the PM, the high precision control of the piezo-actuated stage is a challenging task. This paper discusses the high precision adaptive control for the piezo-actuated stage, where the hysteresis is described by Prandtl-Ishlinskii model. Only the parameters which are directly needed in the controller design are estimated. The proposed control law ensures the global stability of the controlled stage, and the position error can be controlled to approach to zero asymptotically. Experimental results show the effectiveness of the proposed method.

本文言語English
ホスト出版物のタイトル2010 IEEE International Conference on Robotics and Biomimetics, ROBIO 2010
ページ1440-1445
ページ数6
DOI
出版ステータスPublished - 2010 12 1
イベント2010 IEEE International Conference on Robotics and Biomimetics, ROBIO 2010 - Tianjin, China
継続期間: 2010 12 142010 12 18

出版物シリーズ

名前2010 IEEE International Conference on Robotics and Biomimetics, ROBIO 2010

Conference

Conference2010 IEEE International Conference on Robotics and Biomimetics, ROBIO 2010
国/地域China
CityTianjin
Period10/12/1410/12/18

ASJC Scopus subject areas

  • 人工知能
  • バイオテクノロジー
  • 人間とコンピュータの相互作用

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