High precision adaptive control for XY-table driven by piezo-actuator

研究成果: Conference contribution

2 引用 (Scopus)

抜粋

The XY-table is composed of two piezo electric actuators (PEA) and a positioning mechanism (PM). Due to existence of hysteretic nonlinearity in the PEA and the friction in the PM, the high precision control for the XY-table is a challenging task. This paper discusses the high precision adaptive control for the XY-table, where the hysteresis is described by Prandtl-Ishlinskii model. The proposed control law ensures the global stability of the controlled stage, and the position error can be controlled to approach to zero asymptotically. Experimental results show the effectiveness of the proposed method.

元の言語English
ホスト出版物のタイトル2011 International Conference on Advanced Mechatronic Systems, ICAMechS 2011 - Final Program
ページ466-471
ページ数6
出版物ステータスPublished - 2011 10 12
イベント2011 International Conference on Advanced Mechatronic Systems, ICAMechS 2011 - Zhengzhou, China
継続期間: 2011 8 112011 8 13

出版物シリーズ

名前2011 International Conference on Advanced Mechatronic Systems, ICAMechS 2011 - Final Program

Conference

Conference2011 International Conference on Advanced Mechatronic Systems, ICAMechS 2011
China
Zhengzhou
期間11/8/1111/8/13

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering

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  • これを引用

    Chen, X. (2011). High precision adaptive control for XY-table driven by piezo-actuator. : 2011 International Conference on Advanced Mechatronic Systems, ICAMechS 2011 - Final Program (pp. 466-471). [6024938] (2011 International Conference on Advanced Mechatronic Systems, ICAMechS 2011 - Final Program).