High precision adaptive control for XY-table driven by piezo-actuator

研究成果: Conference contribution

2 被引用数 (Scopus)

抄録

The XY-table is composed of two piezo electric actuators (PEA) and a positioning mechanism (PM). Due to existence of hysteretic nonlinearity in the PEA and the friction in the PM, the high precision control for the XY-table is a challenging task. This paper discusses the high precision adaptive control for the XY-table, where the hysteresis is described by Prandtl-Ishlinskii model. The proposed control law ensures the global stability of the controlled stage, and the position error can be controlled to approach to zero asymptotically. Experimental results show the effectiveness of the proposed method.

本文言語English
ホスト出版物のタイトル2011 International Conference on Advanced Mechatronic Systems, ICAMechS 2011 - Final Program
ページ466-471
ページ数6
出版ステータスPublished - 2011 10 12
イベント2011 International Conference on Advanced Mechatronic Systems, ICAMechS 2011 - Zhengzhou, China
継続期間: 2011 8 112011 8 13

出版物シリーズ

名前2011 International Conference on Advanced Mechatronic Systems, ICAMechS 2011 - Final Program

Conference

Conference2011 International Conference on Advanced Mechatronic Systems, ICAMechS 2011
国/地域China
CityZhengzhou
Period11/8/1111/8/13

ASJC Scopus subject areas

  • 電子工学および電気工学
  • 機械工学

フィンガープリント

「High precision adaptive control for XY-table driven by piezo-actuator」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル