High precision control for nano-stage driven by magnetostrictive actuator

Xinkai Chen, Chun Yi Su

研究成果: Conference contribution

抜粋

The nano-stage driven by magnetostrictive actuator is composed of a magnetostrictive actuator and a positioning mechanism (PM). Due to the existence of hysteretic nonlinearity in the magnetostrictive actuator and the friction behavior in the PM, the accurate position control of the nano-stage is a challenging task. This paper discusses the high precision control for the magnetostrictive nano-stage, where the hysteresis is described by Preisach model. The proposed control law ensures the zero output tracking of the controlled stage. Experimental results show the effectiveness of the proposed method.

元の言語English
ホスト出版物のタイトルIntelligent Robotics and Applications - 6th International Conference, ICIRA 2013, Proceedings
ページ666-677
ページ数12
エディションPART 2
DOI
出版物ステータスPublished - 2013 10 7
イベント6th International Conference on Intelligent Robotics and Applications, ICIRA 2013 - Busan, Korea, Republic of
継続期間: 2013 9 252013 9 28

出版物シリーズ

名前Lecture Notes in Computer Science (including subseries Lecture Notes in Artificial Intelligence and Lecture Notes in Bioinformatics)
番号PART 2
8103 LNAI
ISSN(印刷物)0302-9743
ISSN(電子版)1611-3349

Conference

Conference6th International Conference on Intelligent Robotics and Applications, ICIRA 2013
Korea, Republic of
Busan
期間13/9/2513/9/28

ASJC Scopus subject areas

  • Theoretical Computer Science
  • Computer Science(all)

フィンガープリント High precision control for nano-stage driven by magnetostrictive actuator' の研究トピックを掘り下げます。これらはともに一意のフィンガープリントを構成します。

  • これを引用

    Chen, X., & Su, C. Y. (2013). High precision control for nano-stage driven by magnetostrictive actuator. : Intelligent Robotics and Applications - 6th International Conference, ICIRA 2013, Proceedings (PART 2 版, pp. 666-677). (Lecture Notes in Computer Science (including subseries Lecture Notes in Artificial Intelligence and Lecture Notes in Bioinformatics); 巻数 8103 LNAI, 番号 PART 2). https://doi.org/10.1007/978-3-642-40849-6-66