High precision control for piezo-actuated XY-table

研究成果: Conference contribution

抄録

The piezo-actuated XY-table is composed of two piezo electric actuators (PEA) and a positioning mechanism (PM). Due to existence of hysteretic nonlinearity in the PEA and the friction in the PM, the high precision control for the XY-table is a challenging task. This paper discusses the high precision adaptive control for the XY-table, where the hysteresis is described by Prandtl-Ishlinskii model. The proposed control law ensures the global stability of the controlled stage, and the position error can be controlled to approach to zero asymptotically. Experimental results show the effectiveness of the proposed method.

本文言語English
ホスト出版物のタイトル2012 IEEE International Conference on Robotics and Biomimetics, ROBIO 2012 - Conference Digest
ページ2381-2386
ページ数6
DOI
出版ステータスPublished - 2012 12 1
イベント2012 IEEE International Conference on Robotics and Biomimetics, ROBIO 2012 - Guangzhou, China
継続期間: 2012 12 112012 12 14

出版物シリーズ

名前2012 IEEE International Conference on Robotics and Biomimetics, ROBIO 2012 - Conference Digest

Conference

Conference2012 IEEE International Conference on Robotics and Biomimetics, ROBIO 2012
国/地域China
CityGuangzhou
Period12/12/1112/12/14

ASJC Scopus subject areas

  • 人工知能
  • バイオテクノロジー

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