High precision control of the piezo-actuated stage

Toshikuni Ozaki, Xinkai Chen

研究成果: Conference contribution

抄録

The piezo-actuated nano-positioner is composed of a piezoelectric actuator (PEA) and a positioning mechanism (PM). Due to the existence of hysteretic nonlinearity in the PEA and the friction behavior in the PM, the accurate position control of the piezo-actuated stage is a challenging task. This paper discusses the adaptive control for the piezo-actuated nano-positioner, where the hysteresis is described by Prandtl-Ishlinskii model. The proposed control law ensures the zero output tracking of the controlled nano-positioner. Experimental results show the effectiveness of the proposed method.

本文言語English
ホスト出版物のタイトル2010 International Conference on Modelling, Identification and Control, ICMIC 2010
ページ376-381
ページ数6
出版ステータスPublished - 2010 10 18
イベント2010 International Conference on Modelling, Identification and Control, ICMIC 2010 - Okayama, Japan
継続期間: 2010 7 172010 7 19

出版物シリーズ

名前2010 International Conference on Modelling, Identification and Control, ICMIC 2010

Conference

Conference2010 International Conference on Modelling, Identification and Control, ICMIC 2010
国/地域Japan
CityOkayama
Period10/7/1710/7/19

ASJC Scopus subject areas

  • 制御およびシステム工学

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