The permittivities and the moisture resistance of LaY Ox films annealed at 600 °C with different Y concentrations are investigated. The permittivities of 40%Y-LaY Ox and 70%Y-LaY Ox films are higher than 25. The high permittivities come from the well crystallized hexagonal phase of LaY Ox films, since the hexagonal phase rare earth oxides show higher permittivity than the cubic phase ones due to the smaller molar volume of the hexagonal phase. Furthermore, the high permittivity LaY Ox films (40%Y-LaY Ox and 70%Y-LaY Ox) show a strong resistance to the moisture due to the introduction of Y2 O3.
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