Higher-k LaYOx films with strong moisture resistance

Yi Zhao, Koji Kita, Kentaro Kyuno, Akira Toriumi

研究成果: Article査読

69 被引用数 (Scopus)

抄録

The permittivities and the moisture resistance of LaY Ox films annealed at 600 °C with different Y concentrations are investigated. The permittivities of 40%Y-LaY Ox and 70%Y-LaY Ox films are higher than 25. The high permittivities come from the well crystallized hexagonal phase of LaY Ox films, since the hexagonal phase rare earth oxides show higher permittivity than the cubic phase ones due to the smaller molar volume of the hexagonal phase. Furthermore, the high permittivity LaY Ox films (40%Y-LaY Ox and 70%Y-LaY Ox) show a strong resistance to the moisture due to the introduction of Y2 O3.

本文言語English
論文番号252905
ジャーナルApplied Physics Letters
89
25
DOI
出版ステータスPublished - 2006
外部発表はい

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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