Higher-k LaYOx films with strong moisture resistance

Yi Zhao; Koji Kita; Kentaro Kyuno; Akira Toriumi

doi:10.1063/1.2420794

Higher-k LaYO_x films with strong moisture resistance

Yi Zhao, Koji Kita, Kentaro Kyuno, Akira Toriumi

研究成果 › 査読

72 被引用数 (Scopus)

抄録

The permittivities and the moisture resistance of LaY Ox films annealed at 600 °C with different Y concentrations are investigated. The permittivities of 40%Y-LaY Ox and 70%Y-LaY Ox films are higher than 25. The high permittivities come from the well crystallized hexagonal phase of LaY Ox films, since the hexagonal phase rare earth oxides show higher permittivity than the cubic phase ones due to the smaller molar volume of the hexagonal phase. Furthermore, the high permittivity LaY Ox films (40%Y-LaY Ox and 70%Y-LaY Ox) show a strong resistance to the moisture due to the introduction of Y2 O3.

本文言語	English
論文番号	252905
ジャーナル	Applied Physics Letters
巻	89
号	25
DOI	https://doi.org/10.1063/1.2420794
出版ステータス	Published - 2006
外部発表	はい

ASJC Scopus subject areas

物理学および天文学（その他）

文献へのアクセス

10.1063/1.2420794

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引用スタイル

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title = "Higher-k LaYOx films with strong moisture resistance",

abstract = "The permittivities and the moisture resistance of LaY Ox films annealed at 600 °C with different Y concentrations are investigated. The permittivities of 40%Y-LaY Ox and 70%Y-LaY Ox films are higher than 25. The high permittivities come from the well crystallized hexagonal phase of LaY Ox films, since the hexagonal phase rare earth oxides show higher permittivity than the cubic phase ones due to the smaller molar volume of the hexagonal phase. Furthermore, the high permittivity LaY Ox films (40%Y-LaY Ox and 70%Y-LaY Ox) show a strong resistance to the moisture due to the introduction of Y2 O3.",

author = "Yi Zhao and Koji Kita and Kentaro Kyuno and Akira Toriumi",

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AU - Zhao, Yi

AU - Kita, Koji

AU - Kyuno, Kentaro

AU - Toriumi, Akira

N1 - Funding Information: This work was partly supported by a Grant-in-Aid for Scientific Research from the Ministry of Education, Culture, Sports, Science and Technology in Japan, and NEDO/MIRAI project.

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AB - The permittivities and the moisture resistance of LaY Ox films annealed at 600 °C with different Y concentrations are investigated. The permittivities of 40%Y-LaY Ox and 70%Y-LaY Ox films are higher than 25. The high permittivities come from the well crystallized hexagonal phase of LaY Ox films, since the hexagonal phase rare earth oxides show higher permittivity than the cubic phase ones due to the smaller molar volume of the hexagonal phase. Furthermore, the high permittivity LaY Ox films (40%Y-LaY Ox and 70%Y-LaY Ox) show a strong resistance to the moisture due to the introduction of Y2 O3.

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