Higher-k LaYOx films with strong moisture-robustness

Yi Zhao, Koji Kita, Kentaro Kyuno, Akira Toriumi

研究成果: Conference contribution

抄録

The permittivities and the resistance to moisture of LaYOx (LYO) films annealed at 600°C with different Y concentrations are investigated. The permittivities of 40%Y-LYO film and 70%Y-LYO film are higher than 25. The high permittivities come from the well crystallized hexagonal phase of LYO films. For rare earth oxides, the hexagonal phase shows higher permittivity than the cubic phase due to the smaller molar volume of the hexagonal phase. Furthermore, the high permittivity LYO films (40%Y-LYO and 70%Y-LYO) show strong resistance to the moisture due to the introduction Of Y2O 3 which owns stronger resistance to the moisture than La 2O3.

本文言語English
ホスト出版物のタイトルICSICT-2006
ホスト出版物のサブタイトル2006 8th International Conference on Solid-State and Integrated Circuit Technology, Proceedings
出版社IEEE Computer Society
ページ427-429
ページ数3
ISBN(印刷版)1424401615, 9781424401611
DOI
出版ステータスPublished - 2006
外部発表はい
イベントICSICT-2006: 2006 8th International Conference on Solid-State and Integrated Circuit Technology - Shanghai, China
継続期間: 2006 10 232006 10 26

出版物シリーズ

名前ICSICT-2006: 2006 8th International Conference on Solid-State and Integrated Circuit Technology, Proceedings

Conference

ConferenceICSICT-2006: 2006 8th International Conference on Solid-State and Integrated Circuit Technology
国/地域China
CityShanghai
Period06/10/2306/10/26

ASJC Scopus subject areas

  • 電子工学および電気工学

フィンガープリント

「Higher-k LaYOx films with strong moisture-robustness」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル