Highly c-axis oriented monocrystalline Pb(Zr, Ti)O3 based thin film on Si wafer by sputter deposition with fast cooling process

Hiroaki Hanzawa, Shinya Yoshida, Kiyotaka Wasa, Shuji Tanaka

研究成果: Conference contribution

2 被引用数 (Scopus)

抄録

We have successfully obtained a highly c-axis oriented epitaxial Pb(Zr, Ti)O3 (PZT) based thin film, 0.06Pb(Mn1/3, Nb2/3)O3-0.94Pb(Zr0.5, Ti0.5)O3 (PMnN-PZT), on a (100) Si substrate by fast cooling of the substrate just after sputter deposition. The Si substrates were covered with SrRuO3//La0.5Sr0.5CoO3//CeO2//yttria-stabilized zirconia buffer layers. It is found that c-axis orientation ratio of the PMnN-PZT thin film has reached more than 75% owing to the fast cooling (∼-180°C/min) although a-axis orientation is normally predominant on a Si substrate in a conventional sputtering process. A piezoelectric unimorph microcantilever utilizing the PMnN-PZT thin film was fabricated for characterizing the dielectric and piezoelectric properties. No damage was observed after the microfabrication process. As a result, 1∼4-μm-thick PMnN-PZT thin films exhibited a piezoelectric coefficient as large as e31,f = ∼-14 C/m2 with a small dielectric constant of εr = ∼270. These unique properties can provide an excellent figure of merit, (e31,f)20εr = ∼80 GPa, for piezoelectric microelectro-mechanical systems (MEMS) sensors such as piezoelectric gyroscope. The present piezoelectric thin films are expected to be used for a variety of high-performance piezoelectric MEMS devices.

本文言語English
ホスト出版物のタイトルIEEE International Ultrasonics Symposium, IUS
出版社IEEE Computer Society
ページ907-910
ページ数4
ISBN(電子版)9781479970490
DOI
出版ステータスPublished - 2014 10月 20
外部発表はい
イベント2014 IEEE International Ultrasonics Symposium, IUS 2014 - Chicago, United States
継続期間: 2014 9月 32014 9月 6

出版物シリーズ

名前IEEE International Ultrasonics Symposium, IUS
ISSN(印刷版)1948-5719
ISSN(電子版)1948-5727

Conference

Conference2014 IEEE International Ultrasonics Symposium, IUS 2014
国/地域United States
CityChicago
Period14/9/314/9/6

ASJC Scopus subject areas

  • 音響学および超音波学

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