抄録
Micro-fabrication of periodic structures was performed by holographic lithography technique in SU-8 photoresist using a simple and versatile experimental arrangement based on a diffractive beam-splitter. High-fidelity two- and three-dimensional microstructures fabricated with sub-micrometric resolution in large areas of approximately 1 mm diameter. The structures are potentially usable as elements of micro-fluidic systems (e.g., Brownian ratchets), and templates for photonic crystal devices (e.g., mirrors, collimators, superprisms).
| 元の言語 | English |
|---|---|
| ページ（範囲） | 7943-7953 |
| ページ数 | 11 |
| ジャーナル | Optics Express |
| 巻 | 14 |
| 発行部数 | 17 |
| DOI | |
| 出版物ステータス | Published - 2006 |
| 外部発表 | Yes |
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ASJC Scopus subject areas
- Atomic and Molecular Physics, and Optics
これを引用
Holographic lithography of periodic two-and three-dimensional microstructures in photoresist SU-8. / Kondo, Toshiaki; Juodkazis, Saulius; Mizeikis, Vygantas; Misawa, Hiroaki; Matsuo, Shigeki.
：: Optics Express, 巻 14, 番号 17, 2006, p. 7943-7953.研究成果: Article
}
TY - JOUR
T1 - Holographic lithography of periodic two-and three-dimensional microstructures in photoresist SU-8
AU - Kondo, Toshiaki
AU - Juodkazis, Saulius
AU - Mizeikis, Vygantas
AU - Misawa, Hiroaki
AU - Matsuo, Shigeki
PY - 2006
Y1 - 2006
N2 - Micro-fabrication of periodic structures was performed by holographic lithography technique in SU-8 photoresist using a simple and versatile experimental arrangement based on a diffractive beam-splitter. High-fidelity two- and three-dimensional microstructures fabricated with sub-micrometric resolution in large areas of approximately 1 mm diameter. The structures are potentially usable as elements of micro-fluidic systems (e.g., Brownian ratchets), and templates for photonic crystal devices (e.g., mirrors, collimators, superprisms).
AB - Micro-fabrication of periodic structures was performed by holographic lithography technique in SU-8 photoresist using a simple and versatile experimental arrangement based on a diffractive beam-splitter. High-fidelity two- and three-dimensional microstructures fabricated with sub-micrometric resolution in large areas of approximately 1 mm diameter. The structures are potentially usable as elements of micro-fluidic systems (e.g., Brownian ratchets), and templates for photonic crystal devices (e.g., mirrors, collimators, superprisms).
UR - http://www.scopus.com/inward/record.url?scp=33747754793&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=33747754793&partnerID=8YFLogxK
U2 - 10.1364/OE.14.007943
DO - 10.1364/OE.14.007943
M3 - Article
C2 - 19529163
AN - SCOPUS:33747754793
VL - 14
SP - 7943
EP - 7953
JO - Optics Express
JF - Optics Express
SN - 1094-4087
IS - 17
ER -