Holographic lithography of periodic two-and three-dimensional microstructures in photoresist SU-8

Toshiaki Kondo, Saulius Juodkazis, Vygantas Mizeikis, Hiroaki Misawa, Shigeki Matsuo

研究成果: Article査読

106 被引用数 (Scopus)

抄録

Micro-fabrication of periodic structures was performed by holographic lithography technique in SU-8 photoresist using a simple and versatile experimental arrangement based on a diffractive beam-splitter. High-fidelity two- and three-dimensional microstructures fabricated with sub-micrometric resolution in large areas of approximately 1 mm diameter. The structures are potentially usable as elements of micro-fluidic systems (e.g., Brownian ratchets), and templates for photonic crystal devices (e.g., mirrors, collimators, superprisms).

本文言語English
ページ(範囲)7943-7953
ページ数11
ジャーナルOptics Express
14
17
DOI
出版ステータスPublished - 2006

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

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