Imaging properties of bright-field and annular-dark-field scanning confocal electron microscopy

K. Mitsuishi, A. Hashimoto, M. Takeguchi, M. Shimojo, K. Ishizuka

研究成果: Article査読

19 被引用数 (Scopus)

抄録

Imaging properties of scanning confocal electron microscopy (SCEM) were studied by calculating simple model systems using the multislice method. A simple geometrical explanation was given, particularly for the difference between bright field (BF) and annular dark field (ADF) SCEM. It is demonstrated that the BF-SCEM image contrast consists of two features. One gradually changes over a wide defocus range and depends on the lateral size of the object. Another appears only near the focus and is independent of sample size. On the contrary, ADF-SCEM image contrast does not depend on the lateral size of the object. Therefore, the ADF-SCEM will provide more readily interpretable image contrast.

本文言語English
ページ(範囲)20-26
ページ数7
ジャーナルUltramicroscopy
111
1
DOI
出版ステータスPublished - 2010 12
外部発表はい

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 原子分子物理学および光学
  • 器械工学

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