Improved heat treatment for wafer direct bonding between semiconductors and magnetic garnets

Hideki Yokoi, Tetsuya Mizumoto, Koichi Maru, Yoshiyuki Naito

研究成果: Article

10 引用 (Scopus)

抄録

The optical propagation loss of rib waveguides fabricated on magnetic garnet films increased upon annealing in H2 ambient during wafer direct bonding. The heat treatment in wafer direct bonding between InP and Gd3Ga5O12 was investigated with the aim of circumventing the loss increase. The bonding was achieved by heat treatment in H2 ambient at temperatures of ≦ 330°C or in N2 ambient.

元の言語English
ページ(範囲)2784-2787
ページ数4
ジャーナルJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
36
発行部数5 A
出版物ステータスPublished - 1997 5
外部発表Yes

Fingerprint

Garnets
garnets
heat treatment
Heat treatment
wafers
Semiconductor materials
Light propagation
Waveguides
Annealing
waveguides
annealing
propagation
Temperature
temperature

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)
  • Engineering(all)

これを引用

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abstract = "The optical propagation loss of rib waveguides fabricated on magnetic garnet films increased upon annealing in H2 ambient during wafer direct bonding. The heat treatment in wafer direct bonding between InP and Gd3Ga5O12 was investigated with the aim of circumventing the loss increase. The bonding was achieved by heat treatment in H2 ambient at temperatures of ≦ 330°C or in N2 ambient.",
keywords = "Absorption loss, Garnets, Wafer direct bonding, X-ray photoelectron spectroscopy rib waveguide",
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T1 - Improved heat treatment for wafer direct bonding between semiconductors and magnetic garnets

AU - Yokoi, Hideki

AU - Mizumoto, Tetsuya

AU - Maru, Koichi

AU - Naito, Yoshiyuki

PY - 1997/5

Y1 - 1997/5

N2 - The optical propagation loss of rib waveguides fabricated on magnetic garnet films increased upon annealing in H2 ambient during wafer direct bonding. The heat treatment in wafer direct bonding between InP and Gd3Ga5O12 was investigated with the aim of circumventing the loss increase. The bonding was achieved by heat treatment in H2 ambient at temperatures of ≦ 330°C or in N2 ambient.

AB - The optical propagation loss of rib waveguides fabricated on magnetic garnet films increased upon annealing in H2 ambient during wafer direct bonding. The heat treatment in wafer direct bonding between InP and Gd3Ga5O12 was investigated with the aim of circumventing the loss increase. The bonding was achieved by heat treatment in H2 ambient at temperatures of ≦ 330°C or in N2 ambient.

KW - Absorption loss

KW - Garnets

KW - Wafer direct bonding

KW - X-ray photoelectron spectroscopy rib waveguide

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JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

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IS - 5 A

ER -