Improved heat treatment for wafer direct bonding between semiconductors and magnetic garnets

Hideki Yokoi, Tetsuya Mizumoto, Koichi Maru, Yoshiyuki Naito

研究成果: Article査読

11 被引用数 (Scopus)

抄録

The optical propagation loss of rib waveguides fabricated on magnetic garnet films increased upon annealing in H2 ambient during wafer direct bonding. The heat treatment in wafer direct bonding between InP and Gd3Ga5O12 was investigated with the aim of circumventing the loss increase. The bonding was achieved by heat treatment in H2 ambient at temperatures of ≦ 330°C or in N2 ambient.

本文言語English
ページ(範囲)2784-2787
ページ数4
ジャーナルJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
36
5 A
出版ステータスPublished - 1997 5 1
外部発表はい

ASJC Scopus subject areas

  • 工学(全般)
  • 物理学および天文学(全般)

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