抄録
The optical propagation loss of rib waveguides fabricated on magnetic garnet films increased upon annealing in H2 ambient during wafer direct bonding. The heat treatment in wafer direct bonding between InP and Gd3Ga5O12 was investigated with the aim of circumventing the loss increase. The bonding was achieved by heat treatment in H2 ambient at temperatures of ≦ 330°C or in N2 ambient.
| 元の言語 | English |
|---|---|
| ページ（範囲） | 2784-2787 |
| ページ数 | 4 |
| ジャーナル | Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers |
| 巻 | 36 |
| 発行部数 | 5 A |
| 出版物ステータス | Published - 1997 5 |
| 外部発表 | Yes |
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ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)
- Engineering(all)
これを引用
Improved heat treatment for wafer direct bonding between semiconductors and magnetic garnets. / Yokoi, Hideki; Mizumoto, Tetsuya; Maru, Koichi; Naito, Yoshiyuki.
：: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 巻 36, 番号 5 A, 05.1997, p. 2784-2787.研究成果: Article
}
TY - JOUR
T1 - Improved heat treatment for wafer direct bonding between semiconductors and magnetic garnets
AU - Yokoi, Hideki
AU - Mizumoto, Tetsuya
AU - Maru, Koichi
AU - Naito, Yoshiyuki
PY - 1997/5
Y1 - 1997/5
N2 - The optical propagation loss of rib waveguides fabricated on magnetic garnet films increased upon annealing in H2 ambient during wafer direct bonding. The heat treatment in wafer direct bonding between InP and Gd3Ga5O12 was investigated with the aim of circumventing the loss increase. The bonding was achieved by heat treatment in H2 ambient at temperatures of ≦ 330°C or in N2 ambient.
AB - The optical propagation loss of rib waveguides fabricated on magnetic garnet films increased upon annealing in H2 ambient during wafer direct bonding. The heat treatment in wafer direct bonding between InP and Gd3Ga5O12 was investigated with the aim of circumventing the loss increase. The bonding was achieved by heat treatment in H2 ambient at temperatures of ≦ 330°C or in N2 ambient.
KW - Absorption loss
KW - Garnets
KW - Wafer direct bonding
KW - X-ray photoelectron spectroscopy rib waveguide
UR - http://www.scopus.com/inward/record.url?scp=0031147089&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0031147089&partnerID=8YFLogxK
M3 - Article
AN - SCOPUS:0031147089
VL - 36
SP - 2784
EP - 2787
JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
SN - 0021-4922
IS - 5 A
ER -