Improved heat treatment for wafer direct bonding between semiconductors and magnetic garnets

Hideki Yokoi; Tetsuya Mizumoto; Koichi Maru; Yoshiyuki Naito

Improved heat treatment for wafer direct bonding between semiconductors and magnetic garnets

Hideki Yokoi, Tetsuya Mizumoto, Koichi Maru, Yoshiyuki Naito

研究成果: Article › 査読

抄録

The optical propagation loss of rib waveguides fabricated on magnetic garnet films increased upon annealing in H₂ ambient during wafer direct bonding. The heat treatment in wafer direct bonding between InP and Gd₃Ga₅O₁₂ was investigated with the aim of circumventing the loss increase. The bonding was achieved by heat treatment in H₂ ambient at temperatures of ≦ 330°C or in N₂ ambient.

本文言語	English
ページ（範囲）	2784-2787
ページ数	4
ジャーナル	Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
巻	36
号	5 A
出版ステータス	Published - 1997 5 1
外部発表	はい

ASJC Scopus subject areas

Engineering(all)
Physics and Astronomy(all)

フィンガープリント「Improved heat treatment for wafer direct bonding between semiconductors and magnetic garnets」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル

@article{07b55f5594da4699ba4b5ceba60ff09c,

title = "Improved heat treatment for wafer direct bonding between semiconductors and magnetic garnets",

abstract = "The optical propagation loss of rib waveguides fabricated on magnetic garnet films increased upon annealing in H2 ambient during wafer direct bonding. The heat treatment in wafer direct bonding between InP and Gd3Ga5O12 was investigated with the aim of circumventing the loss increase. The bonding was achieved by heat treatment in H2 ambient at temperatures of ≦ 330°C or in N2 ambient.",

keywords = "Absorption loss, Garnets, Wafer direct bonding, X-ray photoelectron spectroscopy rib waveguide",

author = "Hideki Yokoi and Tetsuya Mizumoto and Koichi Maru and Yoshiyuki Naito",

year = "1997",

month = may,

day = "1",

language = "English",

volume = "36",

pages = "2784--2787",

journal = "Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes",

issn = "0021-4922",

publisher = "Japan Society of Applied Physics",

number = "5 A",

}

TY - JOUR

T1 - Improved heat treatment for wafer direct bonding between semiconductors and magnetic garnets

AU - Yokoi, Hideki

AU - Mizumoto, Tetsuya

AU - Maru, Koichi

AU - Naito, Yoshiyuki

PY - 1997/5/1

Y1 - 1997/5/1

N2 - The optical propagation loss of rib waveguides fabricated on magnetic garnet films increased upon annealing in H2 ambient during wafer direct bonding. The heat treatment in wafer direct bonding between InP and Gd3Ga5O12 was investigated with the aim of circumventing the loss increase. The bonding was achieved by heat treatment in H2 ambient at temperatures of ≦ 330°C or in N2 ambient.

AB - The optical propagation loss of rib waveguides fabricated on magnetic garnet films increased upon annealing in H2 ambient during wafer direct bonding. The heat treatment in wafer direct bonding between InP and Gd3Ga5O12 was investigated with the aim of circumventing the loss increase. The bonding was achieved by heat treatment in H2 ambient at temperatures of ≦ 330°C or in N2 ambient.

KW - Absorption loss

KW - Garnets

KW - Wafer direct bonding

KW - X-ray photoelectron spectroscopy rib waveguide

UR - http://www.scopus.com/inward/record.url?scp=0031147089&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0031147089&partnerID=8YFLogxK

M3 - Article

AN - SCOPUS:0031147089

VL - 36

SP - 2784

EP - 2787

JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

SN - 0021-4922

IS - 5 A

ER -