Improvement of depth resolution of ADF-SCEM by deconvolution -- Effects of electron energy loss and chromatic aberration on depth resolution

X. Zhang; X. Zhang;M.Takeguchi;A.Hashimoto;K.Mitsuishi;M.Tezuka Shimojo

Improvement of depth resolution of ADF-SCEM by deconvolution -- Effects of electron energy loss and chromatic aberration on depth resolution

X. Zhang, X. Zhang;M.Takeguchi;A.Hashimoto;K.Mitsuishi;M.Tezuka Shimojo

機能制御システム専攻

研究成果 › 査読

本文言語	English
ページ（範囲）	603-611
ジャーナル	Microsc. Microanal.
巻	18
出版ステータス	Published - 2012 12月 1

引用スタイル

@article{6b9d74b687af4ef7b4617001ed2521b9,

title = "Improvement of depth resolution of ADF-SCEM by deconvolution -- Effects of electron energy loss and chromatic aberration on depth resolution",

author = "X. Zhang and Shimojo, {X. Zhang;M.Takeguchi;A.Hashimoto;K.Mitsuishi;M.Tezuka}",

year = "2012",

month = dec,

day = "1",

language = "English",

volume = "18",

pages = "603--611",

journal = "Microsc. Microanal.",

}