Improvement of friction and wear performance of titanium nitride films by chlorine ion implantation

Atsushi Mitsuo, Tatsuhiko Aizawa

研究成果: Article

27 引用 (Scopus)

抄録

TiN films were prepared on high speed tool steel substrates by means of hollow cathode discharge ion plating, and were implanted with chlorine ions at doses from 1 × 1020 to 1 × 1021 m-2 to improve tribological properties. Friction and wear tests were carried out on a pin-on-disk tribometer with type 304 stainless steel ball as the counter material. The structure of the surface layers modified by ion implantation was characterized by X-ray diffraction analysis (XRD). X-ray photoelectron spectroscopy (XPS) was used to analyze the chemical bonding states and the depth distribution of elements in surface layers of TiN films. Surface observation and chemical composition analysis of the wear track were also carried out by scanning electron microscope (SEM) and energy dispersive X-ray spectroscopy (EDX), respectively. The chlorine ion implantation significantly reduced the friction coefficient of the TiN films against the stainless steel balls. The wear mode has drastically changed from adhesive wear to abrasive wear by this Cl-implantation to the TiN film. With increasing Cl dose, not only the friction coefficient but also the wear volume of the stainless steel balls were reduced. This implies that the implanted chlorine prevents the adhesion of the counter material, resulting in the significant reduction of the friction coefficient.

元の言語English
ページ(範囲)1361-1366
ページ数6
ジャーナルmaterials transactions, jim
40
発行部数12
出版物ステータスPublished - 1999 12
外部発表Yes

Fingerprint

Titanium nitride
titanium nitrides
Chlorine
Ion implantation
chlorine
ion implantation
friction
Wear of materials
Friction
Stainless Steel
coefficient of friction
balls
stainless steels
Stainless steel
surface layers
counters
Ions
dosage
tribometers
ion plating

ASJC Scopus subject areas

  • Engineering(all)

これを引用

Improvement of friction and wear performance of titanium nitride films by chlorine ion implantation. / Mitsuo, Atsushi; Aizawa, Tatsuhiko.

:: materials transactions, jim, 巻 40, 番号 12, 12.1999, p. 1361-1366.

研究成果: Article

Mitsuo, Atsushi ; Aizawa, Tatsuhiko. / Improvement of friction and wear performance of titanium nitride films by chlorine ion implantation. :: materials transactions, jim. 1999 ; 巻 40, 番号 12. pp. 1361-1366.
@article{5c707f6231714ba6bdc3217e7d17b363,
title = "Improvement of friction and wear performance of titanium nitride films by chlorine ion implantation",
abstract = "TiN films were prepared on high speed tool steel substrates by means of hollow cathode discharge ion plating, and were implanted with chlorine ions at doses from 1 × 1020 to 1 × 1021 m-2 to improve tribological properties. Friction and wear tests were carried out on a pin-on-disk tribometer with type 304 stainless steel ball as the counter material. The structure of the surface layers modified by ion implantation was characterized by X-ray diffraction analysis (XRD). X-ray photoelectron spectroscopy (XPS) was used to analyze the chemical bonding states and the depth distribution of elements in surface layers of TiN films. Surface observation and chemical composition analysis of the wear track were also carried out by scanning electron microscope (SEM) and energy dispersive X-ray spectroscopy (EDX), respectively. The chlorine ion implantation significantly reduced the friction coefficient of the TiN films against the stainless steel balls. The wear mode has drastically changed from adhesive wear to abrasive wear by this Cl-implantation to the TiN film. With increasing Cl dose, not only the friction coefficient but also the wear volume of the stainless steel balls were reduced. This implies that the implanted chlorine prevents the adhesion of the counter material, resulting in the significant reduction of the friction coefficient.",
author = "Atsushi Mitsuo and Tatsuhiko Aizawa",
year = "1999",
month = "12",
language = "English",
volume = "40",
pages = "1361--1366",
journal = "Materials Transactions",
issn = "1345-9678",
publisher = "Japan Institute of Metals (JIM)",
number = "12",

}

TY - JOUR

T1 - Improvement of friction and wear performance of titanium nitride films by chlorine ion implantation

AU - Mitsuo, Atsushi

AU - Aizawa, Tatsuhiko

PY - 1999/12

Y1 - 1999/12

N2 - TiN films were prepared on high speed tool steel substrates by means of hollow cathode discharge ion plating, and were implanted with chlorine ions at doses from 1 × 1020 to 1 × 1021 m-2 to improve tribological properties. Friction and wear tests were carried out on a pin-on-disk tribometer with type 304 stainless steel ball as the counter material. The structure of the surface layers modified by ion implantation was characterized by X-ray diffraction analysis (XRD). X-ray photoelectron spectroscopy (XPS) was used to analyze the chemical bonding states and the depth distribution of elements in surface layers of TiN films. Surface observation and chemical composition analysis of the wear track were also carried out by scanning electron microscope (SEM) and energy dispersive X-ray spectroscopy (EDX), respectively. The chlorine ion implantation significantly reduced the friction coefficient of the TiN films against the stainless steel balls. The wear mode has drastically changed from adhesive wear to abrasive wear by this Cl-implantation to the TiN film. With increasing Cl dose, not only the friction coefficient but also the wear volume of the stainless steel balls were reduced. This implies that the implanted chlorine prevents the adhesion of the counter material, resulting in the significant reduction of the friction coefficient.

AB - TiN films were prepared on high speed tool steel substrates by means of hollow cathode discharge ion plating, and were implanted with chlorine ions at doses from 1 × 1020 to 1 × 1021 m-2 to improve tribological properties. Friction and wear tests were carried out on a pin-on-disk tribometer with type 304 stainless steel ball as the counter material. The structure of the surface layers modified by ion implantation was characterized by X-ray diffraction analysis (XRD). X-ray photoelectron spectroscopy (XPS) was used to analyze the chemical bonding states and the depth distribution of elements in surface layers of TiN films. Surface observation and chemical composition analysis of the wear track were also carried out by scanning electron microscope (SEM) and energy dispersive X-ray spectroscopy (EDX), respectively. The chlorine ion implantation significantly reduced the friction coefficient of the TiN films against the stainless steel balls. The wear mode has drastically changed from adhesive wear to abrasive wear by this Cl-implantation to the TiN film. With increasing Cl dose, not only the friction coefficient but also the wear volume of the stainless steel balls were reduced. This implies that the implanted chlorine prevents the adhesion of the counter material, resulting in the significant reduction of the friction coefficient.

UR - http://www.scopus.com/inward/record.url?scp=0033337670&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0033337670&partnerID=8YFLogxK

M3 - Article

AN - SCOPUS:0033337670

VL - 40

SP - 1361

EP - 1366

JO - Materials Transactions

JF - Materials Transactions

SN - 1345-9678

IS - 12

ER -