Improvement of friction and wear performance of titanium nitride films by chlorine ion implantation.

A. Mitsuo, T. Aizawa

研究成果: Article

@article{dedf5e9bf8c2454486d398d091515a97,

title = "Improvement of friction and wear performance of titanium nitride films by chlorine ion implantation.",

author = "A. Mitsuo and T. Aizawa",

year = "1800",

language = "English",

volume = "40 [12] (1999)",

pages = "1361--1366",

journal = "Materials Transactions",

issn = "1345-9678",

publisher = "Japan Institute of Metals (JIM)",

}