Improving the lateral resolution of the MFM technique to the 10 nm range

M. R. Koblischka, U. Hartmann, T. Sulzbach

研究成果: Article査読

37 被引用数 (Scopus)

抄録

A powerful tool to investigate the magnetic properties of harddisk heads in the range of about 10 nm is demanded by magnetic data storage industry. Magnetic force microscopy (MFM) tips are prepared using the electron-beam deposition technique, which reaches the highest spatial resolution, but is not well suited for batch production. Therefore, also FIB milling is employed to produce MFM tips with a high aspect ratio similar to electron-beam deposition tips. We show that both types of tips not only improve the spatial resolution, but also considerably reduce perturbation effects on soft magnetic structures.

本文言語English
ページ(範囲)2138-2140
ページ数3
ジャーナルJournal of Magnetism and Magnetic Materials
272-276
III
DOI
出版ステータスPublished - 2004 5月
外部発表はい

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 凝縮系物理学

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