Integration of terraced laser diode and garnet crystals by wafer direct bonding

Hideki Yokoi, Takashi Waniishi, Tetsuya Mizumoto, Masafumi Shimizu, Kazumasa Sakurai, Naoki Futakuchi, Yoshiaki Nakano

研究成果: Article

2 引用 (Scopus)

抄録

Integration of a semiconductor laser diode and an optical isolator was studied using the wafer direct bonding technique. A terraced laser diode was fabricated by reactive ion etching using CH4/H2/O2 gas. A smooth and vertical mirror facet was obtained by adjusting the flow rate of the etchant gas. Room-temperature pulsed laser operation was achieved in the laser diode with one cleaved facet and the second facet formed by reactive ion etching. The terraced laser diode was integrated with garnet crystals by wafer direct bonding. Room-temperature pulsed laser operation was confirmed after the bonding process.

元の言語English
ページ(範囲)3463-3467
ページ数5
ジャーナルJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
40
発行部数5 A
出版物ステータスPublished - 2001 5
外部発表Yes

Fingerprint

Garnets
garnets
Semiconductor lasers
semiconductor lasers
wafers
Crystals
flat surfaces
crystals
Reactive ion etching
Pulsed lasers
pulsed lasers
etching
etchants
isolators
room temperature
Gases
gases
ions
Mirrors
flow velocity

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

これを引用

Integration of terraced laser diode and garnet crystals by wafer direct bonding. / Yokoi, Hideki; Waniishi, Takashi; Mizumoto, Tetsuya; Shimizu, Masafumi; Sakurai, Kazumasa; Futakuchi, Naoki; Nakano, Yoshiaki.

:: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 巻 40, 番号 5 A, 05.2001, p. 3463-3467.

研究成果: Article

Yokoi, H, Waniishi, T, Mizumoto, T, Shimizu, M, Sakurai, K, Futakuchi, N & Nakano, Y 2001, 'Integration of terraced laser diode and garnet crystals by wafer direct bonding', Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 巻. 40, 番号 5 A, pp. 3463-3467.
Yokoi, Hideki ; Waniishi, Takashi ; Mizumoto, Tetsuya ; Shimizu, Masafumi ; Sakurai, Kazumasa ; Futakuchi, Naoki ; Nakano, Yoshiaki. / Integration of terraced laser diode and garnet crystals by wafer direct bonding. :: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers. 2001 ; 巻 40, 番号 5 A. pp. 3463-3467.
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abstract = "Integration of a semiconductor laser diode and an optical isolator was studied using the wafer direct bonding technique. A terraced laser diode was fabricated by reactive ion etching using CH4/H2/O2 gas. A smooth and vertical mirror facet was obtained by adjusting the flow rate of the etchant gas. Room-temperature pulsed laser operation was achieved in the laser diode with one cleaved facet and the second facet formed by reactive ion etching. The terraced laser diode was integrated with garnet crystals by wafer direct bonding. Room-temperature pulsed laser operation was confirmed after the bonding process.",
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AU - Yokoi, Hideki

AU - Waniishi, Takashi

AU - Mizumoto, Tetsuya

AU - Shimizu, Masafumi

AU - Sakurai, Kazumasa

AU - Futakuchi, Naoki

AU - Nakano, Yoshiaki

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KW - Garnet crystals

KW - InP

KW - Laser diode

KW - Optical isolator

KW - Reactive ion etching

KW - Wafer direct bonding

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