Inverse analysis with surface wave spectroscopy to determine material properties of thin film on substrate.

I. Ihara, T. Aizawa, J. Kihara, H. Koguchi

研究成果: Article › 査読

本文言語	English
ページ（範囲）	575-584
ジャーナル	Simulation of Materials Processing. Theory, Methods and Applications-
巻	(1995)
出版ステータス	Published - 1995 7月 1

引用スタイル

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title = "Inverse analysis with surface wave spectroscopy to determine material properties of thin film on substrate.",

author = "I. Ihara and T. Aizawa and J. Kihara and H. Koguchi",

year = "1995",

month = jul,

day = "1",

language = "English",

volume = "(1995)",

pages = "575--584",

journal = "Simulation of Materials Processing. Theory, Methods and Applications-",

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T1 - Inverse analysis with surface wave spectroscopy to determine material properties of thin film on substrate.

AU - Ihara, I.

AU - Aizawa, T.

AU - Kihara, J.

AU - Koguchi, H.

PY - 1995/7/1

Y1 - 1995/7/1

M3 - Article

VL - (1995)

SP - 575

EP - 584

JO - Simulation of Materials Processing. Theory, Methods and Applications-

JF - Simulation of Materials Processing. Theory, Methods and Applications-

ER -