Investigation of dominant factors to control c-axis tilt angle of aln thin films for efficient energy harvesting

Qi Wang, Hiroyuki Oguchi, Motoaki Hara, Hiroki Kuwano

研究成果: Conference contribution

5 被引用数 (Scopus)

抄録

We investigated the experimental conditions affecting degree of c-axis tilt angle, which is related to output power of piezoelectric energy harvesters, of the oriented aluminum nitride (AlN) thin films grown using electron cyclotron resonance (ECR) sputtering. The c-axis tilt angle of the AlN thin films deposited on silicon (100) substrates was measured by X-ray diffractometry with a 2-dimenaioanl detector (2D XRD). This study verified that 1) lowering the incident angle of the flux during thin film growth and 2) lower substrate temperature, and 3) increasing the buffer layer roughness are effective ways to increase the c-axis tilt angle of the AlN thin films.

本文言語English
ホスト出版物のタイトルMEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems
出版社Institute of Electrical and Electronics Engineers Inc.
ページ636-639
ページ数4
ISBN(印刷版)9781479935086
DOI
出版ステータスPublished - 2014
外部発表はい
イベント27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014 - San Francisco, CA, United States
継続期間: 2014 1 262014 1 30

出版物シリーズ

名前Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN(印刷版)1084-6999

Conference

Conference27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014
CountryUnited States
CitySan Francisco, CA
Period14/1/2614/1/30

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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