Ionic-liquid micro ion source array for flexyble concurrent MEMS process

Tatsuya Suzuki, Motoaki Hara, Hiroyuki Oguchi, Hiroki Kuwano

研究成果: Conference contribution

4 引用 (Scopus)

抜粋

This paper reported a micro ion source array for flexible concurrent fabrication of micro devices. In this study, to simplify and facilitate to integrate the ion sources with high density, ionic liquid (IL) 1-ethyl-3-methl imidazolium tetrafluoroborate ([EMIM]-[BF4]) was applied to the source material of ions. A reservoir for this IL was integrated to the micro emitter array using silicon micromachining. As experimental results, emitting of the ion from the [EMIM]-[BF4] and volatilization of silicon fluoride when exposing the silicon wafer to the emitted ion could be confirmed.

元の言語English
ホスト出版物のタイトルIEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013
ページ315-318
ページ数4
DOI
出版物ステータスPublished - 2013
外部発表Yes
イベントIEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013 - Taipei, Taiwan, Province of China
継続期間: 2013 1 202013 1 24

出版物シリーズ

名前Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN(印刷物)1084-6999

Conference

ConferenceIEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013
Taiwan, Province of China
Taipei
期間13/1/2013/1/24

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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  • これを引用

    Suzuki, T., Hara, M., Oguchi, H., & Kuwano, H. (2013). Ionic-liquid micro ion source array for flexyble concurrent MEMS process. : IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013 (pp. 315-318). [6474241] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2013.6474241