Ionic-liquid micro ion source array for flexyble concurrent MEMS process

Tatsuya Suzuki, Motoaki Hara, Hiroyuki Oguchi, Hiroki Kuwano

研究成果

4 被引用数 (Scopus)

抄録

This paper reported a micro ion source array for flexible concurrent fabrication of micro devices. In this study, to simplify and facilitate to integrate the ion sources with high density, ionic liquid (IL) 1-ethyl-3-methl imidazolium tetrafluoroborate ([EMIM]-[BF4]) was applied to the source material of ions. A reservoir for this IL was integrated to the micro emitter array using silicon micromachining. As experimental results, emitting of the ion from the [EMIM]-[BF4] and volatilization of silicon fluoride when exposing the silicon wafer to the emitted ion could be confirmed.

本文言語English
ホスト出版物のタイトルIEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013
ページ315-318
ページ数4
DOI
出版ステータスPublished - 2013
外部発表はい
イベントIEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013 - Taipei, Taiwan, Province of China
継続期間: 2013 1 202013 1 24

出版物シリーズ

名前Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN(印刷版)1084-6999

Conference

ConferenceIEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013
国/地域Taiwan, Province of China
CityTaipei
Period13/1/2013/1/24

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 凝縮系物理学
  • 機械工学
  • 電子工学および電気工学

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