Key mechanism for improved EM lifetime of CoWP capped Cu interconnects

Y. Kakuhara, Y. Kakuhara;N. Kawahara;K.Ueno, N.Oda N.Oda, Kazuyoshi Ueno

研究成果: Article

元の言語English
ページ(範囲)144-145
ジャーナルEntended Abstracts of the 2006 Int. Conf, on Solid State Dev. and Mat.
出版物ステータスPublished - 2006 9 13

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