Large area micro-texture imprinting onto metallic sheet via CNC stamping

Tatstuhiko Aizawa, Masahiro Tamaki, Tatsuya Fukuda

研究成果: Conference contribution

4 引用 (Scopus)

抄録

Micro-lens array and micro optical elements require for geometrically accurate registration of micro-patterns onto the oxide glasses. Heat radiation device and heat reservoir units have to equip their own unique micro-patterns with high aspect ratio. Lithography and related processes, or, micro- And nano-imprinting are effective to make these micro-patterns once onto the silicon or silica substrates. Even in those applications, the aspect ratio of micro-patterns is still limited to be shallow. The authors have been developing a new method to fabricate a DLC (Diamond-Like Carbon) coated mother mold-die by plasma oxygen etching and to duplicate the original micro-patterns on the mold-die onto the metallic and plastic sheets. This approach is suitable not only to mass-production of micro-patterned sensors and devices but also to selective nano- And micro-imprinting of various micro-patterns onto the metallic sheets. In the present paper, a micro-cavity pattern with the unit size of 3.5x3.5x4.6 m3 is imprinted onto an aluminum sheet with the thickness of 0.08 mm by CNC-stamping with use of the micro-textured DLC-die. This CNC-stamping system is revised to make motion control both in loading and unloading processes for improvement of geometric accuracy and increase of aspect ratio in the micro-cavity pattern. Among several motion-control programs, a pulse-wise motion is employed to duplicate the deeper micro-cavity patterns onto the aluminum sheets.

元の言語English
ホスト出版物のタイトル11th International Conference on Technology of Plasticity, ICTP 2014
出版者Elsevier Ltd
ページ1427-1432
ページ数6
81
DOI
出版物ステータスPublished - 2014
イベント11th International Conference on Technology of Plasticity, ICTP 2014 - Nagoya, Japan
継続期間: 2014 10 192014 10 24

Other

Other11th International Conference on Technology of Plasticity, ICTP 2014
Japan
Nagoya
期間14/10/1914/10/24

Fingerprint

Stamping
Aspect ratio
Aluminum sheet
Textures
Motion control
Diamonds
Plastic sheets
Carbon
Heat radiation
Optical devices
Unloading
Lithography
Etching
Lenses
Silica
Plasmas
Glass
Silicon
Oxides
Oxygen

ASJC Scopus subject areas

  • Engineering(all)

これを引用

Aizawa, T., Tamaki, M., & Fukuda, T. (2014). Large area micro-texture imprinting onto metallic sheet via CNC stamping. : 11th International Conference on Technology of Plasticity, ICTP 2014 (巻 81, pp. 1427-1432). Elsevier Ltd. https://doi.org/10.1016/j.proeng.2014.10.168

Large area micro-texture imprinting onto metallic sheet via CNC stamping. / Aizawa, Tatstuhiko; Tamaki, Masahiro; Fukuda, Tatsuya.

11th International Conference on Technology of Plasticity, ICTP 2014. 巻 81 Elsevier Ltd, 2014. p. 1427-1432.

研究成果: Conference contribution

Aizawa, T, Tamaki, M & Fukuda, T 2014, Large area micro-texture imprinting onto metallic sheet via CNC stamping. : 11th International Conference on Technology of Plasticity, ICTP 2014. 巻. 81, Elsevier Ltd, pp. 1427-1432, 11th International Conference on Technology of Plasticity, ICTP 2014, Nagoya, Japan, 14/10/19. https://doi.org/10.1016/j.proeng.2014.10.168
Aizawa T, Tamaki M, Fukuda T. Large area micro-texture imprinting onto metallic sheet via CNC stamping. : 11th International Conference on Technology of Plasticity, ICTP 2014. 巻 81. Elsevier Ltd. 2014. p. 1427-1432 https://doi.org/10.1016/j.proeng.2014.10.168
Aizawa, Tatstuhiko ; Tamaki, Masahiro ; Fukuda, Tatsuya. / Large area micro-texture imprinting onto metallic sheet via CNC stamping. 11th International Conference on Technology of Plasticity, ICTP 2014. 巻 81 Elsevier Ltd, 2014. pp. 1427-1432
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