Laser micro-fabrication/manipulation of dielectric materials

Hiroaki Misawa, Saulius Juodkazis, Andrius Marcinkevićius, Vygantas Mizeikis, Akira Yamaguchi, Hongbo Sun, Shigeki Matsuo

研究成果: Paper査読

5 被引用数 (Scopus)

抄録

We describe microfabrication of various materials by multi-photon absorption (MPA) of femtosecond (120-150 fs) light pulses. The photo-modification at the focal point of tightly focused laser beam occurs inherently within volume smaller than that defined by the diffraction limit. The achievable lateral resolution is compared with that obtainable by lithography which uses near-field optical microscopy (NSOM). This technique can in principle lead to the realization of 3D optical memory and photonic crystals (PhC) with arbitrary lattice in polymers and silica glass, 3D prototyping in polymerizable resins, and etching of 3D structures guided by the optically damaged pattern in silica. Another topic also discussed in this work deals with laser micromanipulation using continuos wave (cw) laser operating at 1.06 μm. Light-controlled revolution of liquid crystal droplet and volume-phase transition of gel will be described.

本文言語English
ページ23-33
ページ数11
出版ステータスPublished - 2000 12 1
外部発表はい
イベントProceedings of the 2000 International Symposium on Micromechatronics and Human Science - , United States
継続期間: 2000 10 222000 10 25

Conference

ConferenceProceedings of the 2000 International Symposium on Micromechatronics and Human Science
国/地域United States
Period00/10/2200/10/25

ASJC Scopus subject areas

  • 機械工学

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