Liquid sensing system based on two port SH-SAW resonator

T. Nomura, A. Saitoh, Y. Horikoshi, S. Furukawa

研究成果: Conference article査読

11 被引用数 (Scopus)

抄録

A new liquid flow sensing system constructed with SH-SAW resonator was used to characterize the liquid properties. Surface acoustic waves with the shear horizontal displacement (SH-SAW) have been used for sensing the properties in liquid phase. The SH-SAW resonator having two port was fabricated on a 36 rotated Y cut X prop. LiTaO3 (36 YX LiTaO3) substrate. The flow of a sample liquid was precisely controlled by a liquid chromatography system. The transit responses were detected as a sensor response by the two-port SAW resonator. The results showed a specific feature and used to determine the properties of liquid.

本文言語English
ページ(範囲)477-480
ページ数4
ジャーナルUnknown Journal
1
DOI
出版ステータスPublished - 1999 1 1
イベント1999 IEEE Ultrasonics Symposium - Caesars Tahoe, NV, USA
継続期間: 1999 10 171999 10 20

ASJC Scopus subject areas

  • 音響学および超音波学

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