Low-impedance evaluation of power distribution network for decoupling capacitor embedded interposers of 3-D integrated LSI system

Katsuya Kikuchi, Chihiro Ueda, Koichi Takemura, Osamu Shimada, Toshio Gomyo, Yukiharu Takeuchi, Toshikazu Ookubo, Kazuhiro Baba, Masahiro Aoyagi, Toshio Sudo, Kanji Otsuka

研究成果

19 被引用数 (Scopus)

抄録

We evaluated low-impedance power distribution network (PDN) of decoupling capacitor embedded interposers for 3-D integrated LSI system. Measurements are carried out using the developed impedance analyzer system of a wide frequency range for evaluating ultralow impedance, and calculations are carried out using 2.5-D finite element method (FEM) electromagnetic field simulator. We fabricated various types of capacitor mounted or capacitor embedded interposers test element group (TEG), such as surfacemounted and embedded chip capacitors, and thin film capacitors on silicon interposers using the same simple design to compare measurement results with calculation ones. As a result, the chip capacitor embedded organic interposer TEG and thin film capacitor embedded silicon interposer TEG could provide low PDN impedance at a wide frequency range of up to 40 GHz. In particular, the interposer TEGs of the thin film capacitor embedded interposer that shows a low impedance of 0.1Ωcould be evaluated and calculated accurately. By using chip capacitor embedded or thin film capacitor embedded interposers for 3-D integrated LSI system, it is expected that the PDN of the system can be achieved ultralow PDN impedance.

本文言語English
ホスト出版物のタイトル2010 Proceedings 60th Electronic Components and Technology Conference, ECTC 2010
ページ1455-1460
ページ数6
DOI
出版ステータスPublished - 2010
イベント60th Electronic Components and Technology Conference, ECTC 2010 - Las Vegas, NV, United States
継続期間: 2010 6 12010 6 4

出版物シリーズ

名前Proceedings - Electronic Components and Technology Conference
ISSN(印刷版)0569-5503

Conference

Conference60th Electronic Components and Technology Conference, ECTC 2010
国/地域United States
CityLas Vegas, NV
Period10/6/110/6/4

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 電子工学および電気工学

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