Magnification of transportation range using non-contact acoustic levitation by connecting vibrating plates

Yoshiki Hashimoto, Yoshikazu Koike, Sadayuki Ueha

研究成果: Article査読

20 被引用数 (Scopus)

抄録

The authors have identified a new acoustic phenomenon by which an object weighing several kilograms and having a planar shape can be levitated by radiation pressure above a set of vibrating plates. We propose to use this phenomenon for levitation and transportation systems for moving silicon wafers and liquid crystal devices (LCDs). In this report, the authors describe a method that increases the capability of the device to carry large objects by placing two vibrating plates in parallel and enlarges the transportation range by placing the vibrating plates in a series. The results show that a large object such as an LCD 250 mm square can be transported long distances limited only by the number of plates placed in series.

本文言語English
ページ(範囲)3140-3145
ページ数6
ジャーナルJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
36
5 SUPPL. B
DOI
出版ステータスPublished - 1997 5
外部発表はい

ASJC Scopus subject areas

  • 工学(全般)
  • 物理学および天文学(全般)

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