Maskless gray scale lithography and its 3D microfluidic applications

Yoko Yamanishi, Takuma Nakano, Yu Sawada, Kazuyoshi Itoga, Teruo Okano, Fumihito Arai

研究成果: Article査読

1 被引用数 (Scopus)

抄録

This paper presents the novel three-dimensional fabrication using maskless exposure equipment and threedimensional (3D) microfluidic cell manipulation uses grayscale data to directly control the exposed photoresist height without using a mask. The 3D microchannel and microvalve were fabricated simply using lowcost exposure and height ranging from 0 to 200 μm. The 3D microvalve prevents liquid leakage when the membrane is closed - difficult to do using conventional 2D photolithography. We removed the oocyte zona pellucida passing through the 3D microchannel whose cross-section is gradually restricted along the path to provide mechanical stimulation omnidirectionally on the oocyte surface. The microfluidic chip may contribute to make high peeled-oocyte throughput effective without damaging the oocytes.

本文言語English
ページ(範囲)426-433
ページ数8
ジャーナルJournal of Robotics and Mechatronics
23
3
DOI
出版ステータスPublished - 2011 6
外部発表はい

ASJC Scopus subject areas

  • コンピュータ サイエンス(全般)
  • 電子工学および電気工学

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