A new liquid sensor using multi-mode surface acoustic wave (SAW) delay lines is described. SAW having shear horizontal (SH) displacement and Rayleigh (R) mode SAW have been used for measuring the acoustic properties of liquid. A special feature of the sensor is that the SH-SAW and R-SAW delay line are constructed in one substrate. A each mode SAW delay line were constructed on one 36° YX LiNbO3 substrate. The SH-SAW was excited on the X direction and the R-SAW was excited on the direction at 90° to X on the substrate. The measurements were performed for water/glycerol solution. The experimental results show that the attenuation of the SH- and R-SAW are proportional to the viscosity and the density of the loaded solution, respectively. These results indicate that the SH-SAW and R-SAW are very suitable for measuring the acoustic properties of liquid.
|ジャーナル||Proceedings of the Annual IEEE International Frequency Control Symposium|
|出版ステータス||Published - 1998 12月 1|
|イベント||Proceedings of the 1998 IEEE International Frequency Control Symposium - Pasadena, CA, USA|
継続期間: 1998 5月 27 → 1998 5月 29
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