This paper reports a result carried out in order to clarify the applicability of ion irradiation effects to polymer materials used for optical waveguides. We irradiated 950-keV He+ ions or 1.0-MeV H+ ions to a fluorinated polyimide film to a fluence between 1 × 10 14 and 7 × 1016 cm-2, and the film surface was scanned by a profilometer. The depth of a dent induced by the irradiation increases with an increase in the fluence. From the depth of the dent, the projected range of the He+ ions, and the Lorentz-Lorenz equation, the refractive index of the ion-irradiated region was found to increase by 2.9 %. This value agrees with the increment in refractive index measured by spectroscopic ellipsometry, which also increases as the fluence increases. Furthermore, the increment in refractive index, 0.21 %, induced by the irradiation of H+ ions to the fluence of 1 × 10 15 cm-2 is comparable to the value, 0.35 %, observed when H+ ions of a similar fluence were irradiated to SiO2 glass. Therefore, it is natural to assume that the ion irradiation to the polymer can be a good tool to fabricate a high-performance polymer-based optical waveguide.
|ジャーナル||Annual Report - Conference on Electrical Insulation and Dielectric Phenomena, CEIDP|
|出版ステータス||Published - 2012 12 1|
|イベント||2012 IEEE Conference on Electrical Insulation and Dielectric Phenomena, CEIDP 2012 - Montreal, QC, Canada|
継続期間: 2012 10 14 → 2012 10 17
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