Mechanisms of crystalline iron oxide formation in electron beam-induced deposition

Masayuki Shimojo, Masaki Takeguchi, Kazutaka Mitsuishi, Miyoko Tanaka, Kazuo Furuya

研究成果: Article査読

9 被引用数 (Scopus)

抄録

The effects of water vapor and oxygen addition to an iron pentacarbonyl precursor on the formation of iron oxide deposits were studied to understand the mechanism of iron oxide formation in electron beam-induced deposition. The water vapor addition markedly reduced the carbon content in the deposits and led to the formation of crystalline iron oxide. However, the oxygen addition had little effect on the composition and structure of the deposits. This suggests that iron acts as a catalyst and a chemical reaction similar to the water gas reaction occurs during the electron beam-induced deposition.

本文言語English
ページ(範囲)6247-6249
ページ数3
ジャーナルJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
46
9 B
DOI
出版ステータスPublished - 2007 9 20
外部発表はい

ASJC Scopus subject areas

  • 工学(全般)
  • 物理学および天文学(全般)

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