Mechanisms of nano-hole drilling due to nano-probe Intense electron beam irradiation on a stainless steel

S. Bysakh, M. Shimojo, K. Mitsuishi, K. Furuya

研究成果: Article査読

32 被引用数 (Scopus)

抄録

Holes with diameters of a few nanometers were drilled in a stainless steel foil using intense electron beams of 2.4 nm nominal probe size from a field-emission electron gun in a high-resolution transmission electron microscope. Drilling experiments were carried out at regions of different foil thicknesses for different durations using three different condenser lens apertures. A better understanding of the mechanisms of nano-hole drilling by nano-probe electron beams has been achieved in this article. It was observed that the drilling process initiates from the bottom surface of a thin region while it initiates from the top surface for a thick region. It is concluded that material removal during nano-hole drilling is mainly by localized vaporization within the foil and drilling progresses through the formation of a row of interconnected nano-voids along the irradiated volume across the foil thickness.

本文言語English
ページ(範囲)2620-2627
ページ数8
ジャーナルJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
22
6
DOI
出版ステータスPublished - 2004 11
外部発表はい

ASJC Scopus subject areas

  • 凝縮系物理学
  • 電子工学および電気工学

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