抄録
Holes with diameters of a few nanometers were drilled in a stainless steel foil using intense electron beams of 2.4 nm nominal probe size from a field-emission electron gun in a high-resolution transmission electron microscope. Drilling experiments were carried out at regions of different foil thicknesses for different durations using three different condenser lens apertures. A better understanding of the mechanisms of nano-hole drilling by nano-probe electron beams has been achieved in this article. It was observed that the drilling process initiates from the bottom surface of a thin region while it initiates from the top surface for a thick region. It is concluded that material removal during nano-hole drilling is mainly by localized vaporization within the foil and drilling progresses through the formation of a row of interconnected nano-voids along the irradiated volume across the foil thickness.
| 本文言語 | English |
|---|---|
| ページ（範囲） | 2620-2627 |
| ページ数 | 8 |
| ジャーナル | Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures |
| 巻 | 22 |
| 号 | 6 |
| DOI | |
| 出版ステータス | Published - 2004 11 |
| 外部発表 | はい |
ASJC Scopus subject areas
- 凝縮系物理学
- 電子工学および電気工学