MEMS tunable optical filter using auto-cloned photonic crystal

S. Nagasawa, T. Onuki, Y. Ohtera, H. Kuwano

研究成果: Conference contribution

3 被引用数 (Scopus)

抄録

This paper proposes a novel MEMS tunable optical filter (TOP) using an auto-cloned photonic crystal (PhC). The auto-cloning method has great gains to fabricate multi-dimensional PhCs in productivity, flexibility and robustness. A two-dimensional PhC was fabricated by stacking Mb2O5 and SiO2 layers alternately keeping nano-scale periodic corrugations (190nm in pitch) formed on a substrate. This PhC was designed for splitting an incident light into the TM and TE modes at 500nm. Photonic band-gaps were changed by rotating the PhC and the transmittance of the TE mode was changed drastically at 420nm. The PhC was attached on the MEMS device (Eco Scan: Japan Signal) to control its angle of incidence. A resonance frequency of the MEMS structure was 183Hz and that rotation angle reached up to 40 degree. Switching characteristics of our MEMS-TOF were confirmed and its availability was demonstrated.

本文言語English
ホスト出版物のタイトル19th IEEE International Conference on Micro Electro Mechanical Systems
ページ858-861
ページ数4
出版ステータスPublished - 2006 10月 24
外部発表はい
イベント19th IEEE International Conference on Micro Electro Mechanical Systems - Istanbul, Turkey
継続期間: 2006 1月 222006 1月 26

出版物シリーズ

名前Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
2006
ISSN(印刷版)1084-6999

Conference

Conference19th IEEE International Conference on Micro Electro Mechanical Systems
国/地域Turkey
CityIstanbul
Period06/1/2206/1/26

ASJC Scopus subject areas

  • 電子材料、光学材料、および磁性材料
  • 凝縮系物理学
  • 機械工学
  • 電子工学および電気工学

フィンガープリント

「MEMS tunable optical filter using auto-cloned photonic crystal」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル