Micro fabrication development of a vibration-based sputtered PZT thin film micro energy harvester

K. Shibata, S. Ishikawa, K. Tanaka, S. Nagasawa, Z. Cao, H. Oguchi, M. Hara, H. Kuwano

研究成果: Conference contribution

2 被引用数 (Scopus)


We developed a micro fabrication process of vibration-based sputtered PZT micro energy harvester with a proof mass. A PZT film as a piezoelectric material is formed on a cantilever by using sputtering. An electric power is generated because of piezoelectric effect when the cantilever is bended and stressed. The device is fabricated on a Si substrate by MEMS techniques. The cantilever had 1200 μm in length, 600 μm in width, and 50 μm in thickness on the Si substrate. Also, a PZT thin film free standing cantilever was successfully fabricated. A proof mass with 0.42 mg in weight was fabricated on both top of Si substrate cantilever and PZT thin film free standing cantilever. Dynamic and static frequency characteristics and output power generation were experimented by using a shaker and a network analyzer for characterizing the device. The resonant frequency of the Si cantilever was 8.81 kHz. We achieved 418 pW output power at the resonant frequency.

ホスト出版物のタイトルIEEE SENSORS 2012 - Proceedings
出版ステータスPublished - 2012 12月 1
イベント11th IEEE SENSORS 2012 Conference - Taipei, Taiwan, Province of China
継続期間: 2012 10月 282012 10月 31


名前Proceedings of IEEE Sensors


Conference11th IEEE SENSORS 2012 Conference
国/地域Taiwan, Province of China

ASJC Scopus subject areas

  • 電子工学および電気工学


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