Micro fabrication of poly L lacid and its application

Yoshikazu Koike, Hitoshi Takeuchi, Hiroki Hagiwara, Tomoki Ogura, Daichi Aoki, Ken Kumagai, Taku Ishikawa, Hiroyuki Nishikawa

研究成果: Conference contribution

抄録

Poly L lactic acid (PLLA) is attracted a great deal of attention. Because PLLA is a plant-derived plastic and is a bio-compatible one. And also, PLLA has piezoelectricity. Therefore, it is expected that the use of PLLA reduces environmental load in piezoelectric sensors and actuators for consumer applications. For sensor and actuator applications, Micro Electro Mechanical Systems (MEMS) technologies are important. In the fabrication of MEMS by PLLA, ion beam irradiation is consider to be a valuable tool for maskless patterning of high-aspect-ratio structures in the micro- and nanoscale. Proton Beam Writing (PBW) is also expected to apply for the micro fabrication process. In this report, PBW is applied for the micro fabrication of PLLA (poly L lactic acid) polymers which is piezoelectric polymers, plant derivative and has bio-adaptability. PLLA bulk and film are irradiated with 1MeV proton beam (PB). After beam irradiation, the samples are developed by ammonia liquid as the developing solution. As a result, the micro line of 3μm in width and 20μm in depth is fabricated successfully. Finally, the basic piezoelectric polymer actuator is fabricated.

本文言語English
ホスト出版物のタイトル1st IEEE Global Conference on Consumer Electronics 2012, GCCE 2012
ページ60-61
ページ数2
DOI
出版ステータスPublished - 2012 12 1
イベント1st IEEE Global Conference on Consumer Electronics, GCCE 2012 - Tokyo, Japan
継続期間: 2012 10 22012 10 5

出版物シリーズ

名前1st IEEE Global Conference on Consumer Electronics 2012, GCCE 2012

Conference

Conference1st IEEE Global Conference on Consumer Electronics, GCCE 2012
CountryJapan
CityTokyo
Period12/10/212/10/5

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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