Micro-machined micro ion source for flexible and concurrent MEMS process

Shinya Tamonoki; Tomoyuki Ueda; Masahiko Kurotsu; Sumito Nagasawa; Hiroki Kuwano

doi:10.1299/kikaic.76.1902

Micro-machined micro ion source for flexible and concurrent MEMS process

Shinya Tamonoki, Tomoyuki Ueda, Masahiko Kurotsu, Sumito Nagasawa, Hiroki Kuwano

研究成果: Article › 査読

抄録

We present a micro-machined micro ion sources for flexible and concurrent MEMS processes adequate to production of multiple models in smaller lots. The ion source using the B. K. (Barkhausen-Kurz) oscillation was successfully fabricated by using micro-machining. An ion beam current up to several μA was successfully generated from the B. K. type micro ion source unit having φ1 mm × 4.37 mm discharge space.

本文言語	English
ページ（範囲）	1902-1904
ページ数	3
ジャーナル	Nihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C
巻	76
号	768
DOI	https://doi.org/10.1299/kikaic.76.1902
出版ステータス	Published - 2010 8
外部発表	はい

ASJC Scopus subject areas

材料力学
機械工学
産業および生産工学

文献へのアクセス

10.1299/kikaic.76.1902

他のファイルとリンク

引用スタイル

@article{79d3024f05ea436c9aba807a0b502ebb,

title = "Micro-machined micro ion source for flexible and concurrent MEMS process",

abstract = "We present a micro-machined micro ion sources for flexible and concurrent MEMS processes adequate to production of multiple models in smaller lots. The ion source using the B. K. (Barkhausen-Kurz) oscillation was successfully fabricated by using micro-machining. An ion beam current up to several μA was successfully generated from the B. K. type micro ion source unit having φ1 mm × 4.37 mm discharge space.",

keywords = "Ion beam, Mems (micro electro-mechanical system), Micro machining, Nano &",

author = "Shinya Tamonoki and Tomoyuki Ueda and Masahiko Kurotsu and Sumito Nagasawa and Hiroki Kuwano",

year = "2010",

month = aug,

doi = "10.1299/kikaic.76.1902",

language = "English",

volume = "76",

pages = "1902--1904",

journal = "Nihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C",

issn = "0387-5024",

publisher = "Japan Society of Mechanical Engineers",

number = "768",

}

TY - JOUR

T1 - Micro-machined micro ion source for flexible and concurrent MEMS process

AU - Tamonoki, Shinya

AU - Ueda, Tomoyuki

AU - Kurotsu, Masahiko

AU - Nagasawa, Sumito

AU - Kuwano, Hiroki

PY - 2010/8

Y1 - 2010/8

N2 - We present a micro-machined micro ion sources for flexible and concurrent MEMS processes adequate to production of multiple models in smaller lots. The ion source using the B. K. (Barkhausen-Kurz) oscillation was successfully fabricated by using micro-machining. An ion beam current up to several μA was successfully generated from the B. K. type micro ion source unit having φ1 mm × 4.37 mm discharge space.

AB - We present a micro-machined micro ion sources for flexible and concurrent MEMS processes adequate to production of multiple models in smaller lots. The ion source using the B. K. (Barkhausen-Kurz) oscillation was successfully fabricated by using micro-machining. An ion beam current up to several μA was successfully generated from the B. K. type micro ion source unit having φ1 mm × 4.37 mm discharge space.

KW - Ion beam

KW - Mems (micro electro-mechanical system)

KW - Micro machining

KW - Nano &

UR - http://www.scopus.com/inward/record.url?scp=78349256658&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=78349256658&partnerID=8YFLogxK

U2 - 10.1299/kikaic.76.1902

DO - 10.1299/kikaic.76.1902

M3 - Article

AN - SCOPUS:78349256658

VL - 76

SP - 1902

EP - 1904

JO - Nihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C

JF - Nihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C

SN - 0387-5024

IS - 768

ER -

Micro-machined micro ion source for flexible and concurrent MEMS process

抄録

ASJC Scopus subject areas

文献へのアクセス

他のファイルとリンク

フィンガープリント

引用スタイル