We present a micro-machined micro ion sources for flexible and concurrent MEMS processes adequate to production of multiple models in smaller lots. The ion source using the B. K. (Barkhausen-Kurz) oscillation was successfully fabricated by using micro-machining. An ion beam current up to several μA was successfully generated from the B. K. type micro ion source unit having φ1 mm × 4.37 mm discharge space.
|ジャーナル||Nihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C|
|出版ステータス||Published - 2010 8|
ASJC Scopus subject areas
- Mechanics of Materials
- Mechanical Engineering
- Industrial and Manufacturing Engineering