抄録
We present a micro-machined micro ion sources for flexible and concurrent MEMS processes adequate to production of multiple models in smaller lots. The ion source using the B. K. (Barkhausen-Kurz) oscillation was successfully fabricated by using micro-machining. An ion beam current up to several μA was successfully generated from the B. K. type micro ion source unit having φ1 mm × 4.37 mm discharge space.
| 元の言語 | English |
|---|---|
| ページ（範囲） | 1902-1904 |
| ページ数 | 3 |
| ジャーナル | Nihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C |
| 巻 | 76 |
| 発行部数 | 768 |
| 出版物ステータス | Published - 2010 8 |
| 外部発表 | Yes |
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ASJC Scopus subject areas
- Mechanical Engineering
- Mechanics of Materials
- Industrial and Manufacturing Engineering
これを引用
Micro-machined micro ion source for flexible and concurrent MEMS process. / Tamonoki, Shinya; Ueda, Tomoyuki; Kurotsu, Masahiko; Nagasawa, Sumito; Kuwano, Hiroki.
：: Nihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C, 巻 76, 番号 768, 08.2010, p. 1902-1904.研究成果: Article
}
TY - JOUR
T1 - Micro-machined micro ion source for flexible and concurrent MEMS process
AU - Tamonoki, Shinya
AU - Ueda, Tomoyuki
AU - Kurotsu, Masahiko
AU - Nagasawa, Sumito
AU - Kuwano, Hiroki
PY - 2010/8
Y1 - 2010/8
N2 - We present a micro-machined micro ion sources for flexible and concurrent MEMS processes adequate to production of multiple models in smaller lots. The ion source using the B. K. (Barkhausen-Kurz) oscillation was successfully fabricated by using micro-machining. An ion beam current up to several μA was successfully generated from the B. K. type micro ion source unit having φ1 mm × 4.37 mm discharge space.
AB - We present a micro-machined micro ion sources for flexible and concurrent MEMS processes adequate to production of multiple models in smaller lots. The ion source using the B. K. (Barkhausen-Kurz) oscillation was successfully fabricated by using micro-machining. An ion beam current up to several μA was successfully generated from the B. K. type micro ion source unit having φ1 mm × 4.37 mm discharge space.
KW - Ion beam
KW - Mems (micro electro-mechanical system)
KW - Micro machining
KW - Nano &
UR - http://www.scopus.com/inward/record.url?scp=78349256658&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=78349256658&partnerID=8YFLogxK
M3 - Article
AN - SCOPUS:78349256658
VL - 76
SP - 1902
EP - 1904
JO - Nihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C
JF - Nihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C
SN - 0387-5024
IS - 768
ER -