Micro-machined micro ion source for flexible and concurrent MEMS process

Shinya Tamonoki; Tomoyuki Ueda; Masahiko Kurotsu; Sumito Nagasawa; Hiroki Kuwano

doi:10.1299/kikaic.76.1902

Micro-machined micro ion source for flexible and concurrent MEMS process

Shinya Tamonoki, Tomoyuki Ueda, Masahiko Kurotsu, Sumito Nagasawa, Hiroki Kuwano

研究成果: Article › 査読

抄録

We present a micro-machined micro ion sources for flexible and concurrent MEMS processes adequate to production of multiple models in smaller lots. The ion source using the B. K. (Barkhausen-Kurz) oscillation was successfully fabricated by using micro-machining. An ion beam current up to several μA was successfully generated from the B. K. type micro ion source unit having φ1 mm × 4.37 mm discharge space.

本文言語	English
ページ（範囲）	1902-1904
ページ数	3
ジャーナル	Nihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C
巻	76
号	768
DOI	https://doi.org/10.1299/kikaic.76.1902
出版ステータス	Published - 2010 8
外部発表	はい

ASJC Scopus subject areas

Mechanics of Materials
Mechanical Engineering
Industrial and Manufacturing Engineering

文献へのアクセス

10.1299/kikaic.76.1902

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引用スタイル

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