抄録
We present a micro-machined micro ion sources for flexible and concurrent MEMS processes adequate to production of multiple models in smaller lots. The ion source using the B. K. (Barkhausen-Kurz) oscillation was successfully fabricated by using micro-machining. An ion beam current up to several μA was successfully generated from the B. K. type micro ion source unit having φ1 mm × 4.37 mm discharge space.
本文言語 | English |
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ページ(範囲) | 1902-1904 |
ページ数 | 3 |
ジャーナル | Nihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C |
巻 | 76 |
号 | 768 |
DOI | |
出版ステータス | Published - 2010 8 |
外部発表 | はい |
ASJC Scopus subject areas
- Mechanics of Materials
- Mechanical Engineering
- Industrial and Manufacturing Engineering