本文言語 | English |
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ジャーナル | Proceedings of the 1st Symposium on Micro Environmental Machine Systems (μEMS2007) |
出版ステータス | Published - 2007 4月 1 |
Micro-machined Micro Ion Source for Flexible and Concurrent Process To Reduce Power Consumption and Cost
H. Kuwano, S. Tamonoki, S. Nagasawa
研究成果: Article › 査読