Micro-machined Micro Ion Source for Flexible and Concurrent Process To Reduce Power Consumption and Cost

H. Kuwano, S. Tamonoki, S. Nagasawa

研究成果: Article › 査読

本文言語	English
ジャーナル	Proceedings of the 1st Symposium on Micro Environmental Machine Systems (μEMS2007)
出版ステータス	Published - 2007 4月 1

引用スタイル

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