Micro-machined Micro Ion Source for Flexible and Concurrent Process To Reduce Power Consumption and Cost

H. Kuwano, S. Tamonoki, S. Nagasawa

研究成果: Article査読

本文言語English
ジャーナルProceedings of the 1st Symposium on Micro Environmental Machine Systems (μEMS2007)
出版ステータスPublished - 2007 4 1

引用スタイル