Micro-patterning onto DLC coating by plasma oxygen etching

T. Aizawa, E.E. Yunata, .T. Redationo, T. Fukuda

研究成果: Article

元の言語English
ページ(範囲)360-366
ジャーナルProceedings of 7th Conference on MicroManufacturing
1
出版物ステータスPublished - 2012 3 13

これを引用

Aizawa, T., Yunata, E. E., Redationo, . T., & Fukuda, T. (2012). Micro-patterning onto DLC coating by plasma oxygen etching. Proceedings of 7th Conference on MicroManufacturing, 1, 360-366.